双绒面ZnO:Al薄膜的制备及其陷光特性研究

ZnO:Al (AZO) films are extensively researched and applied as the front electrodes of silicon-based thin-film solar cells due to their excellent optoelectronic properties. Textured AZO films can realize light trapping effect, which can achieve a high efficiency in thin film solar cells. Moreover，double-textured AZO films can present better light trapping property. The applicant plans to prepare crater-like textured AZO films by sputtering and etching, and then the hydrothermal method will be applied to synthesis AZO nanorods on crater-like textured AZO films. The novel double-textured AZO films with craters and nanorods will be obtained. The growth conditions of AZO nanorods on crater-like textured AZO films will be explored. The morphology of crater-like textured AZO films will be researched. In addition, the influence of morphology of double-textured AZO films on light-trapping ability and transparency will also be discussed. We will build a model of the novel crater-nanorod-like double-textured structure, and then reveal the light trapping mechanism of double-textured AZO films. The applicant provides a new way to realize fabricating front electrode with good light trapping ability for solar cell at low cost, and it is significant in the scientific research and practical application.

ZnO:Al (AZO)薄膜具有优良的光电性能，在硅基薄膜太阳能电池中作为透明前电极得到了广泛的研究和应用。绒面AZO薄膜可以实现有效的陷光效应，从而提高电池的转换效率。采用双绒面结构可进一步改善薄膜的陷光能力。本项目拟采用简单低成本的水热法在先溅射沉积后腐蚀制得的“弹坑”状绒面AZO薄膜上生长AZO纳米柱阵列，获得具有 “弹坑-纳米柱”新型双绒面结构的AZO薄膜。摸索在“弹坑”状绒面AZO薄膜上生长形貌可控的纳米柱阵列的方法。研究AZO薄膜“弹坑”状绒面结构的形貌及特性对生长AZO纳米柱的影响；研究“弹坑-纳米柱”双绒面AZO薄膜的表面形貌与其陷光特性、透光性等性能的关系；建立AZO薄膜“弹坑-纳米柱”新型双绒面结构的陷光模型，揭示此新型双绒面结构的陷光机制。本项目的研究为实现低成本获得高陷光能力的太阳能电池用透明前电极提供新思路，具有重要的研究意义和应用价值。

绒面ZnO:Al (AZO)薄膜作为薄膜太阳能电池的透明前电极可以实现有效的陷光效应，从而提高太阳能电池的转换效率。本项目通过制备具有 “弹坑-纳米柱”新型双绒面结构的AZO薄膜，来提高薄膜的陷光能力，为实现低成本获得高陷光能力的太阳能电池用透明前电极提供了新思路。主要开展了：（1）“弹坑”状单绒面 AZO 薄膜的制备及其陷光特性研究。利用先溅射沉积后腐蚀法获得了微米级尺寸且分布均匀的“弹坑”状绒面AZO薄膜，薄膜具有较好的透光性和陷光能力；（2）“弹坑-纳米柱”双绒面AZO薄膜的制备及其陷光特性研究。成功获得了“弹坑-纳米柱”新型双绒面结构的AZO薄膜，在保证薄膜较好的透光性和导电性的同时，与“弹坑”状单绒面AZO薄膜相比，陷光能力得到明显提高；（3）AZO 薄膜“弹坑-纳米柱”双绒面结构陷光机制的研究，获得了双绒面 AZO 薄膜的微结构与陷光能力的关系。因此，双绒面AZO薄膜在太阳能电池中具有重要的应用价值。