超薄损耗薄膜与纳米孔复合结构窄带完美吸收特性的研究

Perfect absorber with a narrowband play a vital role in various scientific fields such as biological and index sensor, absorber filter, thermal radiation. In this work, we proposed a tunable narrowband perfect absorber in the near infrared spectrum using a periodic nano hole array in an ultrathin absorbing semiconductor thin film, which can be prepared by self-assembly method combined with reactive ion etching technique. Firstly, we plan to obtain the best structure parameters by the means of 3D finite-difference time-domain(FDTD) simulation and optimization; Secondly, we establish a complete theoretical model, which can help clear the physical mechanism; Finally, the self-assembly and reactive ion etching processes will be optimized through experiments to minimize surface defects and produce a dielectric nano hole array to achieve a narrow-band perfect absorption in the experiment. This project not only provides a new idea and method to realize perfect absorption with narrow band, but also overcomes the complex and expensive preparation process as well as the problem of not being able to process in a large area. Therefore, it is a novel thin film composite structure with broad application prospects.

窄带完美吸收材料在生物以及折射率探测器、吸收式滤光片、热辐射调控等众多领域有着广阔的应用潜力。本项目提出利用微球自组装并结合反应离子束刻蚀技术在超薄有损耗薄膜上制备了周期性的纳米孔阵列实现了近红外波段内可调谐的窄带完美吸收。本项目拟采用电磁波时域差分算法对该结构进行理论仿真优化，初步确定结构的尺寸参数；并且能够建立完整的理论模型，明确其窄带完美吸收的物理机制；最后，通过实验摸索优化自组装和反应离子束刻蚀工艺，尽可能降低表面缺陷，制作出介质纳米孔阵列，在实验上实现半波宽优于15nm的窄带完美吸收。本项目不仅为实现窄带完美吸收提供一种新的思路和方法，还克服了制作纳米结构所涉及的复杂昂贵的制备工艺以及无法大面积加工的问题，因此是一种非常新颖的并且具有十分广阔应用前景的薄膜复合结构。

窄带完美吸收材料在生物以及折射率探测器、吸收式滤光片、热辐射调控等众多领域有着广阔的应用潜力。本项目提出利用微球自组装并结合反应离子束刻蚀技术在超薄有损耗薄膜上制备了周期性的纳米孔阵列实现了近红外波段内可调谐的窄带完美吸收。本项目采用电磁波时域差分算法对该结构进行理论仿真优化，初步确定结构的尺寸参数；并且建立了完整的理论模型，明确其窄带完美吸收的物理机制；最后，通过实验摸索优化自组装和反应离子束刻蚀工艺，尽可能降低表面缺陷，制作出介质纳米孔阵列，在实验上实现半波宽优于15nm，吸收率高于98%的窄带完美吸收。本项目不仅为实现窄带完美吸收提供一种新的思路和方法，还克服了制作纳米结构所涉及的复杂昂贵的制备工艺以及无法大面积加工的问题，因此是一种非常新颖的并且具有十分广阔应用前景的薄膜复合结构。