采用磁过滤真空弧沉积技术制备优质超硬膜的研究

In this project the superhard monolayer and nanometer superhard multilayers have been prepared on by filtered cathodic vacuum arc deposition technique, the structures, mechanical properties and wear resistance of the films have been investigated. It has been shown that very uniform multilayer has been prepared with flat and smooth interface at room temperature. The hardness and elastic modulus of the multilayers with different periods as a function of bilayer thickness have been investigated. The hardnesses of the multilayers are higher than the hardness value suggested by a simple rule of mixture. The wear resistance of the nanometer multilayers has also been studied. A new practicable method preparing superhard nanometer multilayer is studied in the project.

采用磁过滤真空孤沉积技术在金属表面制备优质的金属和金属化合物超硬膜及纳米多层超硬膜在不同沉积条件下的力学性能、耐腐蚀性能和耐磨损性能。此项研究不仅可以提供一种新型实用的超硬薄膜和纳米多层膜的制备方法，而且为发展具有应用前景的超硬薄膜提供基础。.