富氧/羟基高活性纳秒脉冲介质阻挡放电等离子体放电特性及运行机制研究

Dielectric barrier discharge (DBD) is an efficient method to produce large area low temperature plasma. However, in pure He, Ar or N2, etc. gases DBD，the kind of reactive species and the chemical activity are very limited, which affect the processing efficient and effect in applications with DBD technology. In order to meet the need of high ionization efficiency and high active plasma sources, in this project, the nanosecond pulse power supply is used to improve the ionization efficiency and uniformity, and O2/H2O is added into the discharge gas to increase the kind and density of the active particles to achieve high energy efficient and high active plasma source. In order to obtain stable operating conditions and the range of operation parameters of oxygen/hydroxyl enriched uniform DBD, the influence of the addition of O2/H2O ratio on the DBD characteristics will be studied at different experimental conditions. The oxygen/hydroxyl enriched high active nanosecond pulsed DBD will be used for polymer hydrophilic modification to investigate the modification effects under different parameters. The results will help to reveal the synergistic relationship of discharge parameters, main particle density in discharge area, and surface modification effect and it will be helpful to determine the discharge operating mechanism and find effective processing control method. This research will help design high active plasma source, improve discharge theory, and provide theoretical basis and technical support for plasma surface modification and other applications. The study will improve the nanosecond pulse discharge theory and promote the surface modification of polymers industry application and other applications.

介质阻挡放电（DBD）是获得大面积低温等离子体的有效途径。但纯He、Ar或N2等气体DBD中，活性粒子种类单一，化学活性有限，制约DBD技术的处理效率和效果。针对高电离效率、高活性等离子体源的需求，本项目提出利用纳秒脉冲激励提高电离效率及均匀性，添加O2/H2O提高活性粒子种类和密度，来获得高能效、高活性DBD等离子体源。通过研究在不同条件下，添加O2/H2O比例对放电特性的影响，得到富氧/羟基纳秒脉冲均匀DBD稳定运行条件及参数范围，获得O2/H2O对放电特性影响的作用规律，及其对放电影响机制。通过研究富氧/羟基高活性纳秒脉冲DBD聚合物亲水性改性效果及多参数对改性效果的影响，获得放电参数、放电空间主要粒子密度、材料表面改性效果的协同关联关系，进而提出放电运行机制及放电和改性过程有效调控方法，从而为指导高活性等离子体源设计、充实放电理论和促进其表面改性等实际应用提供理论依据和技术支持。

介质阻挡放电（DBD）可以在大气压下获得大面积低温等离子体并被广泛应用于材料表面处理、生物医疗、等离子体显示、污染控制、准分子光源等领域。DBD一般由工频或高频交流电源激励，工作气体为He、Ar或N2等，在实际应用中存在发热严重，均匀性差，活性粒子种类单一，化学活性有限等问题制约DBD在应用领域的处理效率和效果。.本项目针对高电离效率、高活性DBD等离子体源的需求，提出利用纳秒脉冲激励提高DBD电离效率及均匀性，在工作气体中添加O2/H2O提高活性粒子种类和密度，来提高等离子体源能效和活性。通过研究在不同条件下，添加O2/H2O比例对放电特性的影响，通过图像灰度标准差方法和等效电路模型方法，定量计算了放电均匀性和放电微观参量，得到富氧/羟基纳秒脉冲均匀DBD稳定运行条件及参数范围，获得O2/H2O对放电特性影响的作用规律，及其对放电影响机制。并将富氧/羟基高活性纳秒脉冲DBD应用于聚合物亲水性改性，通过电学和光学诊断手段和材料表面物理化学测量方法研究多参数对改性效果的影响，获得放电参数、放电空间主要粒子密度、材料表面改性效果的协同关联关系。在此基础上，提出了放电运行机制及放电和改性过程有效调控方法，从而为指导大气压高活性等离子体源设计、充实放电理论和促进其表面改性等实际应用提供理论依据和技术支持。