含有光子筛的反射/衍射式极紫外光刻物镜关键技术研究

In this project, we propose the theory of using the newly developed photon sieve in the imaging system of extreme ultraviolet lithography. With the design and establishment of hybrid reflective-diffractive extreme ultraviolet lithography objective, we would study the key technologies involved. Using the vector diffraction theory for the analysis of photon sieve utilized in the extreme ultraviolet lithography objective, we will investigate the waveguide effect. We would also develpe a innovative Pinehole Ring Diffraction Model to study and optimize the photon sieve. Using ray tracing and vector diffraction theory, the diffraction aberrations of photon sieve would be discussed.It is a key issue to study the influence of various manufacturing parameters and errors and solve the problems involved in the massive production of high resolution lithography objective with photon sieve. The research of the project could push forward the diffraction theory of photon sieve and promote the development of extreme ultraviolet lithography objective lens.With the modeling, optimization, experiment test and analysis of the hybrid reflective-diffractive extreme ultraviolet lithography objective, we believe a simplified extreme ultraviolet lithography objective could be achieved and the lithography field and energy efficiency could all be greatly improved.

本项目针对目前全反射式极紫外光刻物镜的不足，提出将衍射元件光子筛应用于极紫外光刻成像系统中,建立反射/衍射混合的新型大数值孔径极紫外光刻物镜，完成建模仿真和优化设计，并研究其关键技术。本项目拟采用矢量衍射理论研究极紫外光波经光子筛衍射时的波导效应；通过探索并研究新的“光子筛环带衍射模型”，对光子筛设计参数分析和优化；利用光线追迹理论和衍射理论分析光子筛的衍射像差，结合极紫外光刻物镜的其它离轴反射镜实现像差校正。本项目还研究光子筛的生产工艺，分析微纳衍射孔轮廓形状和蚀刻位置误差对极紫外光刻物镜光强分布、焦斑大小、成像对比度和焦深的影响。最终，制作样机并进行实验验证。通过本项目的研究，预期可以简化极紫外光刻光学系统结构，达到提高视场和能量利用率的目的。

本项目将衍射元件光子筛应用于极紫外光刻成像系统中，建立了反射/衍射混合的新型极紫外光刻物镜的结构形式，完成建模仿真和优化设计，并研究其关键技术。本项目研究了极紫外光波经光子筛衍射时的衍射效应；通过探索并研究新的“光子筛环带衍射模型”，对光子筛设计参数分析和优化；基于“光子筛小孔环带衍射模型”，我们还提出了多分区切趾光子筛的设计理论和设计方法；多分区切趾光子筛不仅具有和普通切趾光子筛相同的归一化光强分布,与此同时，还增加了光子筛尺寸最小的小孔直径，降低了加工难度；利用光线追迹理论和衍射理论分析光子筛的衍射像差，结合极紫外光刻物镜的其它离轴反射镜实现像差校正。本项目还研究了光子筛的生产工艺，分析微纳衍射孔轮廓形状和蚀刻位置误差对极紫外光刻物镜光强分布、焦斑大小、成像对比度和焦深的影响。最终，制作完成样机并进行实验验证。通过本项目的研究，实现了简化极紫外光刻光学系统结构，达到提高视场和能量利用率的目的。这种新的设计方法将有助于完善光子筛衍射的理论，提供了一种全新的反射/衍射混合极紫外光刻物镜形式。