等离子体辅助原子层沉积技术制备高性能纳米孔及其应用研究

The research and application of nanopore nanofluidics has drawn increasing attention in the scientific community, which has demonstrated broad application prospects in the key areas of the national economy, such as biomedical engineering and seawater desalination. The use of track-etching technology for fabrication of polymer nanopores is often characterized by easy preparation, good controllability. And large-scale preparation and application of track-etched nanopores can be achieved. Atomic layer deposition (ALD) technology is a novel and advanced thin film deposition technology. The films grown by ALD are normally uniform, dense, and conformal, so ALD is very suitable for uniformly growing films on porous materials. The project combines the use of ALD and ion track etching technology to prepare advanced functional polmer nanopores, focusing on using ALD to adjust nanopore orifices with ＜10 nm dimension, to engineer the shape of the pore interior and surface property which is particularly appealing because it allows the pore to be equipped with desired functionalities，to explore the principle of atomic layer deposition on organic substrate. Therefore, through atomic layer deposition technology-assisted preparation of track-etched nanopore nanofluidics devices, not only is it of great significance for the development of the ALD technology itself and controllable preparation of nanopore, but also it will greatly advance the application of track-etched nanopore in some attractive applications such as the biomedical field and seawater desalination. This project is of great value in both fundamental study and practical applications.

基于纳米孔的纳米流理论和应用研究是当前科学界普遍关注的热点，相关的研究成果在国民经济的关键领域如能源、生物医学和海水淡化等方面具有广阔的应用前景。采用离子径迹刻蚀技术制备的纳米核孔体系具有制备工艺简单、尺寸一致、可实现大规模制备和应用等特点，而新颖的原子层沉积(ALD)技术所制备的薄膜具有均匀、致密、保形性高，可在纳米孔内壁沉积薄膜，且原子级精确控制其厚度。本项目拟结合双方的优势，研究等离子体辅助ALD在有机基体生长薄膜的机理、制备具有先进功能的纳米核孔体系，特别是精确孔径＜10 nm、孔形异型及可控表面功能修饰的高品质纳米通道等，探索其在能量转换和微流驱动方面的应用。本项目的研究不仅对于ALD沉积机理认知、功能超薄膜应用的扩展、可控纳米核孔技术制备、以及纳米流体理论研究有着重要指导意义，同时会大大促进纳米核孔技术在能源、生物医学和海水淡化等方面的应用，具有重要的基础研究和潜在的应用价值。

基于纳米孔的纳米流理论和应用研究是当前科学界普遍关注的热点，相关的研究成果在国民经济的关键领域如能源、生物医学和海水淡化等方面具有广阔的应用前景。采用离子径迹刻蚀技术制备的纳米核孔体系具有制备工艺简单、尺寸一致、可实现大规模制备和应用等特点，而新颖的原子层沉积(ALD)技术所制备的薄膜具有均匀、致密、保形性高，可以在纳米孔内壁沉积薄膜，且原子级精确控制其厚度。本项目拟结合双方的优势，研究等离子体辅助ALD在有机基体生长薄膜的机理、制备具有先进功能的纳米核孔体系，特别是精确孔径＜10 nm、孔形异型及可控表面功能修饰的高品质纳米通道，探索其在能量转换和微流驱动方面的应用。本项目的研究不仅对于ALD沉积机理认识、功能超薄膜应用的扩展、可控纳米核孔技术制备、以及纳米流体理论研究有着重要指导意义，同时会大大促进纳米核孔技术在能源、生物医学和海水淡化等方面的应用，具有重要的基础研究和潜在的应用价值。