微细电解钻铣削高效加工技术的基础研究

In-depth analysis of key prolems in current electrochemical micromachining technology, such as, low efficiency and poor processing stability, an effective new method is proposed to solve the fabrication problem of numerous metal microstructures in MEMS components and medical devices. The purpose of the new method, which is named the technology of electrochemical micro drilling and milling with high efficiency due to the combination of electrochemical micromachining with ultra short voltage pulses and high-speed milling technology, is to implement the fabrication of metal microstructures with high efficiency, high precision and low cost. Many important basic theoritical pionts, such as the positive effect of micro eddy current on the by-product transportation in the micro sidegap and the multi-field coupling effects on the whole machining process will be deeply studied. Many key techniques, such as the efficient method for fabricating micro electrode with high rotating precision, dynamic optimization of the electric field and the flow field in the micro-machining gap and the technical study of electrochemical micromachining with high efficiency using high-speed micro electride will be overcomed. Afer that, the theoretical and technical system of the technology will be developed to provide basic technical support for the realization of fabricating the metal microstructures with high efficiency and high precision.

本项目针对MEMS部件和医疗器械中大量微尺度金属结构的制造需求，深入分析目前微细电解加工技术存在的加工效率低、加工稳定性差等问题，结合微细电解加工原理和高速铣削的基本思想，提出微细电解钻铣削高效加工技术，以实现微尺度金属结构的高效、精密、低成本制造。课题以显著提高微细电解加工效率为目标，重点研究微小加工间隙内漩涡流对物质传递的影响规律、多场耦合对加工过程的作用机制等基础理论问题；突破高回转精度微电极的高效制备、微小加工间隙内电场和流场的动态优化、高转速微电极微细电解高效加工工艺研究等关键技术问题，构建微细电解钻铣削高效加工理论与技术体系，为实现金属微结构的高效、精密制造提供基础技术支撑。

本项目针对MEMS部件和医疗器械中大量微尺度金属结构的制造需求，以实现金属微结构的高效、精密、低成本制造为目标，围绕微细电解钻铣削高效加工技术，开展了相关基础理论、关键技术等方面的探索研究。深入分析了超短脉冲电流作用下的加工机理，分别建立了纳秒脉冲微细电解钻、铣削加工理论模型；重点研究了高转速微电极带动下的微间隙流场对电极侧壁的绝缘作用和对产物快速输运的作用机理以及多场耦合作用下加工过程的动态模拟等基础理论问题；突破了高回转精度柱状微电极的高效在线制备技术，实现了单阶电极直径为100μm左右，多阶电极末端直径小于15μm，同轴度误差小于1μm的均匀柱状微电极的高效精确制备；开展了深入的高定域性微细电解高速钻、铣削加工工艺试验，成功加工出了小锥度微孔和多种微图形结构等各类典型金属微结构，为实现金属微结构的高效、精密制造提供了基础技术支撑。.已发表学术论文14篇，录用待发表学术论文1篇，其中SCI、EI收录9篇；授权发明专利1项，授权实用新型专利4项，申请发明专利3项；培养硕士生3名。