基于柱状电容传感器的高精度主轴回转误差在线检测研究

High precision spindle is a kind of crucial component of ultra precision machine tools or heavy duty mechanical equipments such as CNC machine tools, huge rotational machinery. The rotational errors of spindle always affect work performance of machines seriously. So it is essential to study relevant methods and devices for monitoring rotational errors of spindle on-line and real-time, and the research work will enhance the accuracy of spindle and make it work reliably and well. This project provides a novel approach on measuring rotational errors of spindle on 5 degree of freedom (DOF) on-line and real-time based on a type of difference cylindrical capacitive sensor (DCCS). Through designing integrated electrode structure of rotor and stator of DCCS, the difficulty of monitoring spindle rotational errors on 5 DOF on-line and real-time will be resolved. By establishing a proper mathematic model of DCCS,optimizing structural parameters of DCCS, resolving key factors such as fringe effect, nolinearity, fabrication technology and so on, the measuring accuracy of DCCS will be improved greatly. A prototype of DCCS and a experimental setup for monitoring spindle rotational errors on 5 DOF will be built, and the ability of DCCS for monitoring 5 DOF rotational errors of spindle will be validated. The novel approach and DCCS should be effective on monitoring rotational errors of high precision spindle on-line and real-time, and will keep ultra precision machine tools and heavy duty mechanical equipments work very well and hold excellent work performance.

高精度主轴是高端数控机床、高性能大型旋转机械等高精/大型机电装备的关键部件，主轴的回转运动误差严重影响整机工作性能。研究主轴多自由度回转运动误差在线实时检测方法与装置，对提高主轴的工作性能、监测其正常可靠运行，具有重要的意义。提出一种基于差分式柱状电容传感器原理的主轴五自由度回转运动误差在线实时监测新方法；通过设计集多自由度位移测量于一体的柱状电容传感器特殊结构，解决主轴回转运动误差在线实时监测难题；通过建立柱状电容传感器数学模型、优化电容传感器结构参数，并解决非线性、边缘效应、制造工艺等影响测量精度的关键因素，以提高柱状电容传感器的测量精度；研制柱状电容传感器原型，构建主轴多自由度回转运动误差实验平台，验证方法的可行性与原型的有效性。建立的主轴五自由度回转运动误差在线监测方法与研制的柱状电容传感器原型，将为监测高精/大型机电装备高精度轴系正常可靠运行、提高工作性能提供方法指导与技术支撑。

高精度主轴（或轴系）是高端数控机床、高性能大型旋转机械等高精尖、大型、超精密机电装备的关键部件，主轴的回转运动误差直接影响整机工作性能的优劣。研究主轴的多自由度回转运动误差检测理论与在线实时检测方法，对监测主轴/整机的正常可靠运行、提高大型、超精密机电装备的工作性能具有非常重要的意义。项目研究提出了一种基于差分式柱状电容传感器原理的主轴五自由度回转运动误差在线实时监测新方法，深入研究了基于柱状电容传感器的主轴五自由度运动误差测量原理，确定了柱状电容传感器的定子、转子极板单元结构布局方法，通过设计集多自由度位移测量于一体的柱状电容传感器特殊结构，解决主轴回转运动误差在线实时监测难题。建立了新型一体化结构的差分式柱状电容传感器的数学模型，完成了主轴多自由度运动误差的测量解耦分析；开展了新型差分式柱状电容传感器测量精度主要影响因素（非线性、边缘效应、制造工艺等）分析，优化传感器的结构参数，获得了提高传感器测量精度的有效措施。建立了新型一体化结构的差分式柱状电容传感器的制造工艺及具体实现技术，成功研制了柱状电容传感器原型，通过构建主轴多自由度回转运动误差实验平台与测量系统，开展主轴运动误差的静态、动态误差实验研究，验证了所提方法的可行性与原型研制的有效性。项目所建立的主轴五自由度回转运动误差在线监测方法与研制的柱状电容传感器原型系统，将为监测高精/大型机电装备高精度轴系正常可靠运行、提高工作性能提供理论方法指导与实现技术支撑。