均匀纳米孔低介电材料的可控制备研究
基本信息
结项摘要
由相同结构POSS分子的自组装制备均匀纳米孔低介电材料，以实现材料中孔洞大小及均匀性的有效控制，将详细研究POSS分子相互作用与组装的行为；并通过改变POSS分子中R基团结构和POSS分子中R数目，实现孔洞大小和密度的有效控制。研究POSS的结构和组装方法，对材料介电性能以及POSS分子氧化裂解动力学影响，建立POSS分子结构－组装技术－介电性能关系的理论模型，为多孔低介电材料的应用奠定基础。
项目摘要
项目成果
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数据更新时间：2023-05-31
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