压电驱动超精定位系统的自适应滤波器建模、控制与振动抑制

In order to solve hysteresis nonlinear problems of piezoceramic actuator(PZA)，the project carries out researches on adaptive filter model,hysteresis compensation,vibration & bifurcation analysis and vibration control of PZA-drived high precision positioning system. adaptive filter model is proposed to improve the accuracy and the dynamical characterization of the PZA hysteresis.Control strategy and stability analysis of hysteresis inverse compensation based on backlash adaptive filter is studied to realize high-accuracy compensation.Vibration and bifurcation analysis of the PZA positioning system are carried out to disclose the relationship between system parameters and instability based on adaptive filter hysteresis model.Vibration control method based on adaptive filter is also investigated to eliminate the vibration effect on the system.These researches play important roles in improving the positioning accruacy, stabilty and reliability of ultra-precision positioning system based on PZA.

针对压电陶瓷执行器存在的迟滞非线性问题，本项目提出开展压电陶瓷执行器驱动超精定位系统的自适应滤波器建模、控制及振动抑制研究。通过开展迟滞建模的自适应滤波器结构及其学习算法研究，提高压电陶瓷执行器迟滞特性自适应滤波器建模的精度和动态表征能力；开展基于自适应滤波器迟滞逆补偿的控制策略和稳定性分析研究，实现迟滞非线性的精确抵消,提高控制器精度；开展压电陶瓷执行器超精定位系统振动分叉分析研究，揭示系统参数与振荡失稳之间的关系；开展基于自适应滤波器的前馈振动控制方法研究，以消除振动对超精定位平台控制精度的影响。本课题开展压电陶瓷执行器的自适应滤波器建模、振动分岔分析与逆补偿控制，对于提高压电驱动超精定位系统精度、稳定性和可靠性具有重要理论研究价值和现实意义。

针对压电陶瓷执行器存在的迟滞非线性问题，本项目提出开展压电陶瓷执行器驱动超精定位系统的自适应滤波器建模、控制与振动抑制研究。通过开展迟滞建模的自适应滤波器结构及其学习算法研究，提高压电陶瓷执行器迟滞特性自适应滤波器建模的精度和动态表征能力；开展基于自适应滤波器迟滞逆补偿的控制策略和稳定性分析研究，实现迟滞非线性的精确抵消，提高控制器精度；开展压电陶瓷执行器超精定位系统振动分叉分析研究，以消除振动对超精定位平台控制精度的影响。本课题开展压电陶瓷执行器的自适应滤波器建模、振动分岔分析与逆补偿控制，对于提高压电驱动超精定位系统进精度、稳定性和可靠性具有重要理论研究价值和现实意义。