高功率在线式MEMS集成微波驻波计基础研究

Microwave standing-wave meters are key components in radar systems for the self-detection application. However, they suffer from great challenges in low power consumption, high power and device volume. Meanwhile, it is still blank for the study of control states in the standing-wave meters. This project innovatively presents the research on an integrated inline MEMS microwave standing-wave meter with high power and its controllable states. Here, Adopting all-passive structures constitutes the standing-wave meter, and by utilizing a directional coupler, two MEMS power sensors based on thermopile principle, and two MEMS capacitive switches achieve the inline measurement of input and reflection power, and voltage-standing-wave-ratio (VSWR) of larger Ka-band signals. Moreover, it has the ability to control detection and non-detection states according to demand, to avoid loss of the microwave power when not need to measure. This project is expected: ① solving the fundamental problem of components’ (coupler, sensors and switches) collaborative design, and proving the interaction between the components; ② establishing a microwave system model including a lumped S-parameter and multi-field conversion and coupling mechanisms in sensing and control processes, clarifying the sensing and control mechanisms, and revealing the effects of components' parameters on the performance of the standing-wave meter; ③ proposing the compatible implementation method of the fabrication and packaging based on the GaAs MMIC and MEMS technology; ④ developing the prototype machine of the MEMS standing-wave meter and verifying the validity by experiments, thereby providing the design theory and the implementation method with a higher reference value for the field of research.

微波驻波计是雷达系统中自检测应用的关键元件，它在低功耗、高功率和体积方面面临巨大挑战。同时，对其工作状态的控制研究尚属空白。本项目创新性地提出高功率在线式MEMS集成微波驻波计及可控状态的结构方案，采用全无源结构，通过定向耦合器、基于热电堆的MEMS功率传感器和MEMS电容式开关，实现在线测量Ka波段较大信号的输入功率、反射功率和驻波比，并可根据需求控制检测和不检测两种状态，避免不需检测时微波信号的损耗。预期：①解决元件协同设计的基础问题，探明各元件之间相互作用关系；②建立包括集总S参数、传感和控制过程中多场转换和耦合机制的微波系统级模型，阐明传感和控制机理，揭示各元件参数对驻波计性能影响的规律；③提出基于GaAs MMIC和MEMS技术的工艺制备和封装的兼容实现方法；④研制出原型样机并通过实验验证其有效性，从而提供了一种具有较高参考价值的设计理论和实现方法。

面向微波驻波计在雷达等系统中自检测的应用，本项目提出了一种基于GaAs MMIC技术的低功耗、高功率、微型化、在线式MEMS集成微波驻波计；采用全无源结构实现，基于微波功率-热-电的测量原理；完成了在线式MEMS集成微波驻波计的协同设计和结构特性研究；完成了在线式MEMS集成微波驻波计的结构仿真和优化研究；完成了微波S参数、微波功率-热-电转换机制和电-力-电磁波耦合机制等微波系统模型的建立；完成了基于GaAs MMIC技术和MEMS技术的兼容制备工艺和单片集成方法；完成了在线式MEMS集成微波驻波计的原型样机的研制，以及完成了其表征和测试研究，并通过实验验证了设计的有效性；建立了一套完整的在线式MEMS集成微波驻波计的设计理论和实现方法，解决了结构设计、模型建立、工艺制备和测试等关键技术。