LED泵浦的高增益铕铒硅酸盐波导光放大器的基础研究

Low cost and high response optical receiver has great application in optical communication network. Broadband pumped Eu-Er waveguide amplifier with several advantages such as low noise, high gain, low cost and easy integration is ideal choice for high response optical receiver and important device for future chip optical interconnection. For the need of high response optical receiver, this project aims to study novel high gain Europium-Erbium waveguide amplifier. By virtue of the number of optical active Er3+ in rare earth silicatel can exceed 1021cm-3,the project will introduce the high concentration Eu2+ and Er3+ in silicate lattice and analyze the dynamic energy transfer processes from the sensitized Eu2+ centers to activated Er3+ centers, and elucidate their related mechanism. Through optimizing the silicate crystalline structure and rare earth concentration, the new Erbium compound films with highly luminescence efficency under broadband excitation will be designed and prepared. To improve the top pump efficiency, the resonant cavity enhanced structure will be designed. By optimizing the waveguide structure and preparation technology, the high performance Erbium waveguide amplifier will be fabricated.

低成本、高灵敏度的光接收机在光通信网络中有巨大应用前景。宽光谱泵浦的铕铒硅酸盐波导放大器具有低噪声、高增益、低成本、可集成优点，是实现光网络终端高灵敏度光接收机的理想选择，同时也是将来芯片光互连技术所需的重要器件。本项目将针对高灵敏度光接收机的需求，以研究高增益铕铒硅酸盐波导放大器为目标，利用稀土硅酸盐中光学激活稀土离子浓度可以超过1021cm-3的特点，通过在硅酸盐晶格中共同引入高浓度Eu2+和Er3+，研究薄膜中敏化中心Eu2+向发光中心Er3+能量传递的机理和动力学过程；优化硅酸盐晶体结构和稀土离子浓度，设计和制备出宽光谱激发下具有高效发光性能的铕铒硅酸盐薄膜材料；采用谐振腔增强型结构提高顶泵浦方式的效率；优化铕铒波导放大器的结构设计和制备工艺，研制出LED泵浦下高增益的铒铕波导放大器。

光波导放大器在光通信和芯片光电集成中有重要应用前景。本项目研究采用超高真空磁控溅射法制备出适用于LED泵浦的铕铒共掺硅酸盐薄膜。光致发光、瞬态光荧光法的研究结果表明宽光谱激发下，薄膜中铕离子和铒离子之间存在高效的能量相互传递过程，铒离子在4I13/2能级寿命达到7.9 ms。以铕铒共掺的薄膜为光放大有源层，制备了二氧化硅加载的光波导，观察到掺铒波导放大器增益。这为实现高效的LED泵浦掺铒波导光放大器奠定了实验基础。与目前掺铒光放大器采用价格昂贵的单模激光器做泵浦源相比，铕铒共掺的硅酸盐薄膜有望采用低成本的LED光源来泵浦，对推动光放大器在光通信中的应用有重要意义。本项目还积极探索与铕铒共掺硅酸盐波导放大器可兼容的光接收机工艺研究，如采用溅射法制备GeSn薄膜光电材料。本项目还研究新型铒稀土离子掺杂钙钛矿材料，实现了可见光激发下，铒离子在红外波段的光发射。这些结果对将来实现光电芯片集成技术非常有意义。