基于分片式介电泳的纳米线批量式组装机理研究

As one of most excellent nanostructure building blocks, nanowires have been widely used for the fabrication and integration of nanoscale devices from the bottom up. To maximize the materials properties of nanowires, there still is a challenge for assembling synthesized nanowires into specified positions in order. In this proposal, we are supposed to carry on the study of quantity assembly techniques for large-scale nanowires, basically including theoretical modeling, experimental analysis and system integration. Then, a set of tools for assembling of massive, multi-pattern and quantity nanowires are designed and developed. That would meet the needs of quantity production of nano-devices, and would be beneficial to promote a further development in the field of nano-system manufacturing..The main research contents are described as follows: Firstly, a physical model is established for describing the motion of nanowires in fluidic and electric fields, and the nanowire behaviors of orientation and translation are calculated and modeled. By analyzing the relations between assembling quality factor and various parameters, the assembling procedure of nanowires can be predicted. On this basis, the off-chip dielectrophoretic device for nanowire assembly is designed and manufactured, including fabricating micro-electrode arrays and microfluidic channels, and preparing the assembling substrates. After that, integrating the flow-electrical signals control system, which consists of intelligent control circuits and dynamic flow control module, with the off-chip dielectrophoretic device, nanowires can be assembled into various patterns with multiple orientations and layers.

纳米线作为一种优异的构筑模块，已被广泛地应用于“自下而上”模式的纳米功能器件的集成与制造。而为了最大限度地发挥纳米线的材料特性，将合成后的纳米线有序地组装进入特定位置仍然是个挑战。本项目拟开展面向纳米线的大规模组装技术的基础理论、实验分析和系统集成研究，从而建立一套满足纳米线大规模、多样化、批量式组装的系统工具，以满足纳米器件批量化制造的需求，推动纳米功能器件制造研究领域的进一步发展。.主要工作内容涉及：从建立描述纳米线在流-电环境下运动的物理模型入手，模拟纳米线的取向和迁移等运动行为，分析纳米线组装品质因数与环境参数的关系，预测纳米线的组装行为。在此基础上，进行分片式介电泳组装芯片的设计制造，涉及微电极阵列基板、微流道的设计制作和组装基底的选材与制备。最后，通过集成流-电信号控制系统，包括智能控制电路和动态流动控制模块，实现纳米线的多角度、多层次、多样式的批量式组装。

本项目系统研究了纳米线的大规模、多样式、批量化组装技术，为研究集成晶体管、柔性导电薄膜、可穿戴设备以及太阳能电池奠定了重要基础，具体研究成果可概括如下：（1）研究建立了纳米线的介电泳动力学模型并进行了介电泳操控过程的电动力学数值仿真。通过系统分析纳米线在交流动电环境下的受力状况，讨论了影响纳米线介电泳操控的相关因素。（2）研制出一套基于分片式介电泳芯片的纳米线大规模组装操控平台，集成纳米线精确组装操控芯片、纳米线实时监控子系统、激励信号控制子系统、微流体控制子系统及计算控制中心为一体，实现对多根纳米线的批量组装、精确定位、可控取向等多种柔性操控功能，并对规则组装后的银纳米线网格进行了光学、电学和弯曲特性检测，验证了基于分片式介电泳规则化组装的银纳米线网格具有良好的光电特性和柔性。（3）将研制的分片式介电泳芯片用于实现微粒子的过滤、分选及富集功能应用。