纤维素基柔性透明导电膜AZO导电层生长机制研究

The cellulose-based conductive film is attracting extensive interest for electronic devices, due to its folding and degradable characteristics. Focusing on the defect from cellulose-based conductive film, such as weak bonding strength, low transparence and conductivity, the aluminum doped zinc oxide (AZO) semiconductor substrate will be grown on the transparently cellulose film for manufacturing cellulose-based AZO conductive film. The zinc oxide (ZnO) buffer layer will be connected with cellulose film by the sol-gel method, which can be beneficial for establishing the cellulose-based AZO conductive film with high bonding strength. The transparency and conductivity of cellulose-based conductive film can be significantly improved, resulting from the high-performance AZO crystal which presents stratified structure and superior lattice matching. In addition, the annealing treatment with high pressure and low temperature will lead to the sufficient relaxation of AZO crystal, which is favorable for optimizing the distribution of Al atoms in the AZO conductive layer. Based on the above, the cellulose-based conductive materials with high bonding strength, transparence and conductivity, can be prepared, which will further afford fundamental and theoretical direction for flexibly, transparently and degradable electronic devices.

具有可折叠、易降解等优势的纤维素基导电膜成为国内外电子技术的研究热点。针对纤维素基导电膜结合强度、导电率以及透明度低等问题，拟开展透明纤维素膜基底上生长铝掺杂氧化锌导电材料（AZO）并制备纤维素基AZO导电膜的研究。利用溶胶-凝胶法在纤维素膜基底上键合ZnO缓冲层，阐明有机纤维素膜基底和无机导电材料AZO的结合机制，构筑纤维素基AZO导电膜的高结合强度体系；调控AZO导电层的生长模式，解析其从三维立体结构到二维层状结构的转变机制，阐明ZnO层的非晶态结构对纤维素膜基底上AZO晶体晶格匹配度的贡献作用，构筑纤维素基AZO导电层的高质量晶体体系，提升纤维素导电膜的光电性能；探明纤维素基AZO导电膜高压低温退火的热力学特征，阐明AZO晶格的充分弛豫对铝原子理想掺杂的调控机制，从而制备高结合强度、高导电性和高透明度的纤维素导电材料，为柔性透明可降解电子设备的发展提供研究基础和理论指导。

具有可折叠、易降解等优势的纤维素基导电基底成为国内外电子技术的研究热点。针对纤维素基导电基底结合强度、导电率以及透明度低等问题，开展透明纤维素膜基底上生长铝掺杂氧化锌导电材料（AZO）并制备纤维素基AZO导电膜的研究。首先基于纤维素的溶解-再生过程，探究后干燥处理对纤维素膜性能影响。结果表明提高干燥温度和干燥压力能够强化纤维素分子链间的结合，形成致密结构、表面光滑的高强度（122 Mpa）、高透明度（96.7%）的纤维素膜。以此纤维素膜为基底，利用磁控溅射AZO制备纤维素基透明导电膜。通过调控溅射条件，采用低温高压的溅射模式实现AZO导电层的二维生长，可以在纤维素膜表面形成粒径较小且均匀的AZO导电层。通过高压热退火处理进一步调控AZO中原子之间的相互作用能力，控制导电材料的缺陷构筑优异导电性能的纤维素基导电膜。针对纤维素柔性基底和AZO无机导电材料之间的结晶结构不匹配的问题，通过溶胶-凝胶技术在纤维素膜与AZO导电层之间引入ZnO缓冲层，基于纤维素与ZnO之间的氢键作用以及ZnO与AZO结晶结构相似的特点，强化纤维素基底与AZO导电层的结合效果，构建绿色环保、柔性、透明的纤维素基导电基底（115 Ω/sq的方块电阻和89％的透光率）。利用制备的导电膜成功研发了高性能的传感器和发光器件。开发基于纤维素膜/ZnO缓冲层/AZO导电层结构的绿色环保和高性能的柔性透明导电薄膜，对于提升传统纤维素行业的技术进步、促进柔性电子元器件的商业化发展具有重要的意义。