提高非晶金刚石薄膜电子场发射性能的研究

Thin films of amorphous diamond and carbon nanotubes used for cathode electron emission have been prepared cuccessfully on filtered arc deposition system. The properties of the electron emission are improved obviously by using plasma treatment on the surface of the films. And, a new configuration of carbon nanotube was observed. Prototypes of the flat panel display and color lamp have been made with the cathodes of amorphous diamond and carbon nanotubs films. As the results, more than 28 papers wear published, and applied one patent. The achievements of this research carried out the important basis of both fundamental and practical. And, also proceeded an advantageously place in the competitions of this field.

以真空磁过滤弧沉积技术制备非晶金刚石薄膜。通过掺杂、改变沉积参数、衬底性质和薄膜几何形貌来提高其电子场发射性能，特别是电流密度和均匀性。选择可形成碳化物的金属元素，经退火后，在衬底与薄膜间形成碳化物过渡层，降低界面的接触势垒，使电子容易从衬底进入薄膜中去。提高对其场发射机理认识，为场发射显示器实用化提供理论和实践依据。