基于微结构化大磨粒金刚石砂轮的光学玻璃超精密磨削机理及技术基础

For the high precision, high efficiency and low cost production requirements of optical glasses components in civilian industry and national defense fields, this project firstly uses picosecond pulse laser to machining three-dimensional micro-structures arrays on the coarse-grained diamond wheels which grain-size are more than 90 microns. The influence of laser machining parameters and ultra-presicion machining tool motion parameters on micro-structured surface topology morphology are investigated. And then the control strategy and characterization methods of micro-structured coarse-grained diamond wheels complex surface topology morphology in picosecond pulse laser machining process are established. On this basis, the mechanism and technology of ultra-precision grinding optical glasses with these micro-structured coarse-grained diamond wheels are researched. By the combination of theoretical analysis, simulation and experiments, the influence of micro-structured diamond wheels surface on grinding wheel performance and ultra-precision grinding process is revealed. Then the ultra-precision grinding mechanism of optical glasses with micro-structured coarse-grained diamond wheels is researched. Finally, the relationship mapping between the surface topology morphology of micro-structured diamond wheels and ground surface integrity of optical glasses is established. Based on the above, an innovation high efficiency, low-damage and ultra-precision grinding technology for optical glasses is successfully developed. This research deliveries will present the theoretical and technological fundaments for the high precision and mass production of optical glasses components. Furthermore, the level of ultra-precision machining technology for hard and brittle materials will be also accordingly promoted.

针对民用工业和国防科技领域对光学玻璃元件的高精度、高效率和低成本生产需求，本项目采用皮秒脉冲激光对粒度为90μm以上的大磨粒金刚石砂轮表面进行三维微结构阵列加工，研究激光辐射参数和超精密机床运动参数对微结构表面拓扑形貌的影响规律，建立皮秒脉冲激光加工过程中的大磨粒金刚石砂轮复杂表面微结构拓扑形貌控制策略及表征方法；以微结构化后的大磨粒金刚石砂轮作为磨削工具，围绕光学玻璃的高效超精密磨削机理及技术基础，运用理论分析、模拟仿真与工艺实验相结合的方法，揭示微结构化砂轮表面对磨具磨削性能和超精密磨削过程的影响规律，探求光学玻璃的微结构化大磨粒金刚石砂轮超精密磨削机理，建立砂轮表面微结构拓扑形貌与光学玻璃表面完整性间的映射关系，提出创新的光学玻璃高效率、低损伤、超精密磨削加工技术，从而为实现光学玻璃元件的高精度和批量化生产奠定技术基础，并提升硬脆难加工材料的超精密加工技术水平。

本项目以光学玻璃等硬脆材料的高效超精密加工为目标，开展了基于微结构化大磨粒金刚石砂轮的超精密磨削加工技术研究。提出了大磨粒金刚石砂轮的脉冲激光微结构化方法，建立了砂轮表面微结构化加工控制策略及其表征方法。研究了光学玻璃的微结构化大磨粒金刚石砂轮超精密磨削机理，揭示了其磨削过程中的材料去除机理和亚表面微观尺度演变机制，为后续工艺路线设计和加工参数的合理选择奠定了理论基础。建立了基于微结构化大磨粒金刚石砂轮的光学玻璃超精密磨削工艺，解决了光学玻璃高效超精密磨削加工过程中亚表层损伤深度大的问题，与传统大磨粒砂轮相比，亚表层损伤深度减小了50%以上。研究了基于微结构化大磨粒金刚石砂轮的微结构表面超精密磨削加工技术，分别在光学玻璃、陶瓷和硬质合金上实现了多种微结构表面的高效超精密磨削加工，拓展了微结构化大磨粒金刚石砂轮的应用领域。