等离激元耦合Ⅲ族氮化物纳米激光器在光/电加载下的光学行为与耦合机制

It is crucial to develop efficient and compact SP-coupled Ⅲ-Nitride nanolaser under optical and electrical loadings for the realization of transformative application including miniaturized smart display, super-resolution and sophisticated biomedical imaging in the integrated photoelectric device. However, the optical pumped lasing behavior and modes evolution mechanism are still vague. And electrical loaded lasing needs further breakthrough in nano-sized fabrication process. Therefore, in this proposal, we plan to develop new SP-coupled Ⅲ-Nitride nanolaser through multiple micro-fabrication technologies (electron beam lithography, nano-imprint, focused ion beam),realize optical pumped lasing with low threshold and observe the lasing characteristics. By solving The Maxwell’s Equations, the correlations of surface plasma/structures/lasing modes as well as the modulation mechanism are also to be studied. In order to gather real-time optical/electrical properties under electrical driven, new type electrode and scanning electron microscope with conductive probes and cathode luminescence will be adopted. It will not only be a great breakthrough of nanolaser, but also give innovative insight to fulfill new optoelectronic and information devices.

要实现小型智能化显像、高分辨生物成像等光电子器件与集成电路的融合应用，认知等离激元耦合Ⅲ族氮化物纳米激光器中的耦合机制并实现电注入激射是关键。但是目前其光注入条件下的激射行为与模式演化机制仍不明确，而且电注入激射更是急需工艺上的突破创新。因此本项目基于多种微纳加工技术（电子束曝光、纳米压印、聚焦离子束等）研发新型纳米激光器，表征其在光加载条件下的光学行为，配合麦克斯韦方程模拟认知等离激元/器件结构/激射模式三者之间的相互影响和调制作用，采用创新型电极设计并结合扫描电子显微镜搭配导电探针以及阴极荧光光谱仪实时观察电加载条件下纳米激光器的光电特性，并根据理论计算优化器件设计最终实现电注入激射。这不仅是激光器器件方面的重大突破，而且还可以为光电子器件与集成电路的融合铺垫实验基础。

III族氮化物材料作为光电器件的增益介质具备得天独厚的优势，目前获得了很多种新颖的微型化激光器，包括光子晶体、微盘、微环、纳米线等。但是要真正实现能够突破光学衍射极限的纳米激光器，金属等离激元的近场耦合效应非常具有潜力的。针对等离激元放大受激辐射机制和超小尺寸下电注入激光两大问题，本项目研究了金属表面等离激元和激子之间的近场强耦合作用，并提出了等离激元耦合放大受激辐射的物理图像。研究了等离激元模式、器件结构和光学性能的三者的动态联系，揭示了器件结构对等离激元模式的调控方法。最终在器件层面，分别实现了光/电注入条件下的从深紫外到可见光波段的室温超低阈值激射，激射阈值处于国际领先水平。本项目研究完成了从材料到理论最终到器件的探索。