Kinetic Monte Carlo 模拟薄膜生长机理的研究
基本信息
结项摘要
本项目用Kinetic Monte Carlo 方法研究薄膜生长的微观机理。经过对国际最新研究动态的充分调研，在前期工作的基础上，进一步深入研究当前描述薄膜生长的DLA理论和RLA理论所揭示的微观机理，寻找DLA理论和RLA理论的内在联系和不足，建立一个基于"基本微观过程"的新模型。模型中考虑了许多新的微观机制，如交换作用、连带作用、亚稳态、非最低能量选择等，并且详细研究了这些机制基于"基本微观过
项目摘要
项目成果
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数据更新时间：2023-05-31
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