自感知/自激励压电泵的研究

Through combining piezoelectric materials' direct with converse piezoelectric effect, a new method is proposed that driving of fluid, automatic detection of fluid's output flow/pressure (self-sensing) and automatic generation of driving voltage frequency of piezoelectric vibrator (self-exciting) can be realized synchronously in this item. Accordingly, a kind of new piezoelectric pump with small volume, high precision, good controllability, great adaptability and self-sensing output flow/pressure and automatic generation of working frequency is proposed, called self-sensing/self-exciting piezoelectric micro-pumps. They may be applied on drugs' delivery, fuel cells, microchemical analysis and so on. The main research contents of this item are as follows. Taking into overall consideration the coupling effects between fluid driving, self-sensing detection and self-exciting of vibration frequency, the influence laws of mechanical-electrical-liquid system elements on the output performances of the self-sensing/self-exciting piezoelectric pumps and the reasonable matching relationship of the systems parameters are obtained from the theory through simulation analysis. The working mechanisms of output flow/pressure self-sensing and vibration frequency self-exciting of piezoelectric vibrators are revealed under the piezoelectric coupling and fluid-solid coupling effect. The key factors for restricting self-sensing and self-exciting ability are extracted. Through adopting piezoelectric wafer and stack as the transducers, several kinds of prototypes of the self-sensing/self-exciting piezoelectric pumps are developed. Their corresponding experiments are conducted. Thereby, the optimal mechanical structure, integration scheme and self-exciting control strategy of vibration frequency are obtained. The self-sensing/self-exciting piezoelectric pumps are designed and manufactured (at least three sets). The designing methods and key technology parameters are supported.

提出将压电材料正/逆压电效应相结合同步实现流体的驱动、流体输出压力/流量自动检测（自感知）以及压电振子驱动电压频率自动生成（自激励）的新方法，进而构造一种体积小、精度高、可控性好、自适应性强且输出流量/压力自感知和工作频率自动生成的自感知/自激励压电泵，用于药品输送、燃料电池、微量化学分析等领域。主要内容：统筹考虑流体驱动、自感知检测与振动频率自激励同步过程的耦合效应，通过模拟与仿真分析，从理论上获得机电液系统要素对自感知/自激励压电泵性能的影响规律以及合理的系统参数匹配关系；揭示压电耦合与流固耦合下压电泵流量/压力自感知和压电振子振动频率自激励的工作机理，提取制约自感知/自激励能力的关键要素；以压电叠堆/晶片为换能器进行自感知/自激励压电泵多种样机的制作与试验，获得最优机械结构、集成方案、振动频率自激励控制策略；完成自感知/自激励压电泵设计与制作（至少3套），提供设计方法、关键技术参数。

本项目以压电耦合与流固耦合下自感知/自激励压电泵的工作机理与内在规律为研究对象，目的是通过将压电材料的正/逆压电效应相结合同步实现流体的驱动、流体输出压力/流量自感知以及压电振子驱动电压频率自激励，研究其流体驱动性能的自感知机理以及自激励振动能力的形成理论与方法，研究了空分复用方法实现压电泵流量/压力自感知的机理，设计制作且验证了基于空分复用的驱动-传感一体化压电泵，并应用空分复用方法进一步研究了双振子驱动式压电泵的流量自感知机理，提出压电双晶片致动泵的流量/压力自检测方法，并完成了自感知压电双晶片隔膜泵的研制与测试，提出基于悬臂梁与碟型自感知阀的新型压电晶片泵与叠堆泵以及基于泵腔液体压力检测的智能型压电泵，研究得到了不同驱动模式对多腔多振子压电泵输出性能的影响规律。本项目研究使得无需外部测量仪器即可获得压电泵输出流体的流量与压力，可作为标准部件用于药品输送/燃料微量喷射/微量化学分析、以及不便或不能利用外部测量仪器进行输出量监测的场合，不仅减低了使用成本，而且减小了系统的体积、质量及复杂程度，将极大地促进压电泵在微机电系统及便携类产品中的推广应用。三年来，本项目研究成果已经在国内外公开发表学术论文12篇，其中SCI检索期刊6篇，EI检索期刊5篇，获得国家发明专利6项，实用新型专利7项，培养硕士研究生1名，在本项目研究基础上获得国家自然科学基金面上项目“基于磁力耦合径向拉-压激励的回转式压电俘能器研究（No.51577173）”1项，项目负责人也由讲师晋升为副教授，并获聘本校硕士生指导教师。