基于在位膜厚测量的大面积微透镜阵列跨尺度加工研究

High precision and high efficiency machining of microlens array has become the focus in the field of frontier manufacturing driven by the huge market demand. Ultra-precision single crystal diamond turning is one of the ideal methods for the trans-scale machining of large area microlens array. However, tool setting error and serious tool wear in the machining process result in microlens array with large machining error, low accuracy and small area. In light of these problems, an ultra-precision trans-scale machining method based on in-situ film thickness measurement for large area microlens array is proposed in this project. Researches on design method of in-situ film thickness measurement system for ultra-precision machine tool, tool wear and error compensation in the machining process, as well as machining method based on in-situ film thickness measurement are carried out to reveal the mechanism of space isolation and collision prevention under the motion constraint of multi-degree of freedom of machine tools, the mechanism of tool wear and tool failure in the machining process, and the tool repositioning theory for the tool changing during the machining process. Problems of high precision and high speed tool setting before the processing, morphology error compensation, as well as accurate tool changing during the processing are solved. The intelligent, high quality and trans-scale manufacturing of large area microlens array is realized by combining ultra-precision machining with in-situ measurement.

大面积微透镜阵列有着重大的市场需求，大面积微透镜阵列高精度高效率制造成为高端制造业的焦点。单晶金刚石超精密切削技术是实现大面积微透镜阵列跨尺度加工的理想方法之一。本项目针对微纳机械加工中金刚石刀具对刀误差大与加工过程中刀具磨损失效导致的微透镜阵列加工误差、精度低与面积小的问题，提出了基于在位膜厚测量的微透镜阵列跨尺度超精密切削加工方法，通过超精密加工中心在位膜厚测量系统设计方法研究，微透镜阵列加工过程中刀具磨损与误差补偿方法研究，以及基于在位膜厚测量的大面积微透镜阵列切削加工方法研究，揭示机床多自由度运动约束下的空间隔离与碰撞防止机制，微透镜阵列加工过程中刀具磨损与失效机理，以及大面积微透镜阵列加工中途换刀的刀具再定位理论这三个科学问题，解决了加工前的智能高精度快速对刀问题、加工过程中的形貌误差补偿与中途精确换刀问题，实现大面积微透镜阵列智能制造、高质量制造和跨尺度制造。

微纳光学器件在现代光学系统中有着重要的应用和巨大的市场需求，超精密切削加工是微纳光学器件制造的重要手段。本项目针对微纳结构阵列高精度和大面积的制造需求，提出了一种基于在位膜厚测量的精确对刀方法和换刀接力加工方法，突破切削加工中对刀误差对工件加工精度的限制，突破刀具磨损对工件尺寸的限制。通过透明薄膜制备与性能测试，超精密加工在位膜厚测量系统设计，基于在位膜厚测量的精确对刀方法和理论和大面积微结构阵列换刀接力加工和理论研究，揭示薄膜表面完整性与膜厚测量精度影响规律，超精密加工换刀接力加工刀具再定位理论，以及换刀拼接加工面形误差补偿这三个科学问题，解决大面积微结构制造难题，实现了大面积微结构阵列单元精度高、总体面积大、整体一致性好的制造目标。