面向精密机床空间坐标测量的波长可调谐散斑光场编码机理与传感方法

Aiming at the demand for high-precision measurement for three-dimensional coordinates of precision machine tools, this project ,inspired by a natural bionic solar navigation mode, conceives a new 3D coordinate measurement mode based on a structured light field of spatial speckles -wavefront sensors array. By studying the modulation and encoding effects of the micro-geometric structure of the scattering medium on the wavelength-tuning spherical wavefront, this project clarifies the mapping relationship between the micro-geometric structure and speckles containing the tuning wavelength and spatial orientation of the wavefront, and studies the spatial light field’s speckle-encoding mechanism with the characteristics of high information density, high spatial resolution and easy recognition, etc.. And focusing on the spatially-structured light field of speckle-encoding, a large-scale inversion design method for scattering medium with sub-wavelength microstructural features is studied. On this basis, a speckle field sensing array is constructed to simultaneously perceive and reconstruct the wavefront information modulated by the scattering medium from several orientations, and to fuse the spatial orientation of the reconstructed spherical wavefront from different orientations to achieve 3D coordinate measurement of the diffraction source. Furthermore, this project carries the research on the applications of spatial positioning error detection and position measurement in precision CNC machine tools. According to the measurement task, sensor array in the spatially-structured light field is optimized to provide a new method with “Beidou Navigation ” positioning performance for precision measurement of multi-degrees of freedom in precision machine tools.

针对精密机床空间三维坐标高精度测量的需求，本项目在自然界太阳光仿生导航模式的启发下，构思了一种基于空间散斑结构光场-波前传感阵列的三维坐标测量新模式。通过研究散射介质微几何结构特征对波长可调谐的球面波前的调制编码作用，阐明蕴含波前空间方位与波长的散斑与散射介质微几何结构之间的映射关系，研究具有高信息密度、高空间分辨率、易识别等散斑特征的空间光场编码机制。以空间结构散斑编码光场为目标驱动，研究具有亚波长微结构特征的散射介质的大规模反演设计方法。在此基础上，构建散斑光场传感阵列，从若干方位同时感知、重构经散射介质调制的波前信息，融合不同方位的重构的球面波前空间方位信息，实现球面波前点衍射源的三维坐标测量。开展精密数控机床空间定位误差检测、位姿测量等应用研究。根据测量任务，优化配置传感阵列，为精密机床空间多自由度高精度测量提供一种具备“北斗”导航定位性能的新方法。

针对精密机床空间三维坐标高精度测量的需求，本项目提出了一种基于空间光场涡旋阵列波前传感的新模式。该研究主要分为光场调控及波前传感和光频扫描干涉（FSI）测量两方面。首先，提出了一种目标驱动的方法来获得干涉波组组态配置，降低了计算成本，更有效地生成高阶模式的涡旋光。此外，提出了多种相位掩模优化设计方法，实现了基于相位调制的光束波前信息的高精度测量。通过仿真和实验证明，该方法可有效抑制散斑噪声，提高波前重建的精度，对涡旋光束的识别和检测具有重要意义。其次，提出了基于Hammerstein模型的非线性主动抑制方法与基于位移Morlet小波变换的非平稳信号瞬时特征提取算法，修正了可调谐光源的非线性，极大程度提高了系统的测量精度。针对实际测量中动态目标的测量问题，提出了基于粒子滤波的动态免疫算法和基于CSMW的动态级联算法，以解决高速运动测量中相位的复合调制问题。在此基础上，提出了基于自适应卡尔曼滤波的FSI测量算法，增强了测量系统的鲁棒性。同时，提出了基于GAN神经网络的非合作目标测量方法，在提高信噪比的同时成功校正了调幅信号的波形，为工业复杂环境下测量提供理论基础。针对空间多目标测量开展了基于空间光调制器（SLM）的多目标测量方法，利用SLM对传统FSI测量方法进行了多维拓展，设计了光纤干涉光路以减小测距中光功率损耗，为精密机床空间多自由度高精度测量提供一种亚微米级别测量方法。