具有大尺度可拉伸多层金膜结构的柔性电极材料的研究

With the development of electronic sensor technology especially wearable devices, electronics are required to have high deformability to meet the needs of being stretched, compressed and twisted. Stretchable electrodes, due to its excellent stretchability, are able to maintain good electronic properties and the ability to exchange signals while being under deformation or stretching to a large extent, and thus become one of the critical techniques in the development of new generation stretchable electronics. This project intends to develop novel stretchable electrodes with excellent stretchability and high spatial resolution. Multilayer gold film structures are innovated with the inspiration of percolation theory. Multilayer gold films are interconnected with the gold nanopillars through various techniques, forming a percolation network system which increases the conductive paths for electrons significantly, therefore enhancing the stretchability of the electrodes. The project is aimed to investigate the multilayer structure design based on percolation theory, fabrication and characterization of the stretchable electrodes with multilayer gold film structures, and the mechanism of stretchability, in order to lay a good foundation for the novel electrode materials being applied in the fields of biomedical microdevices and wearable devices in future work.

随着电子传感器技术尤其是可穿戴设备的快速发展，电子器件需具备高度的形变能力，来满足拉伸、压缩和扭曲等苛刻要求。柔性可拉伸电极材料由于其优异的可拉伸性能，可以在大尺度弯曲，拉伸等形变状态下保持良好的电学性能和信息交互能力，成为开发新一代柔性电子器件的关键技术之一。本项目拟开发新型高拉伸性能，高空间分辨率的柔性可拉伸电极材料，创新设计了多层金膜结构。此多层结构设计依据渗流网络理论为指导思想，通过多种技术手段将多层金膜与金纳米柱结构连接起来，组成一个整体渗流网络系统，显著增加了电子导通的路径，从而增大了柔性电极的拉伸性能。本项目拟对基于渗流理论的多层结构设计，多层金膜结构柔性可拉伸电极的加工制备，其性能表征和拉伸机理进行深入研究，为下一步工作将此新型柔性可拉伸电极材料应用于生物医疗微器械和可穿戴设备等相关领域打好基础。

本项目开发了多层纳米复合结构柔性可拉伸电极，拉伸性能得到显著提高，电极具有多次循环稳定性。其次研究了柔性电极的电学和热学的稳定性能，探索了柔性电极的极限工作条件，同时开发了具有颅内脑电信号监测的柔性皮层脑电电极，并集成皮层脑电监测系统，成功记录大鼠癫痫发作时脑电信号，并利用柔性电极的高空间分辨率对大鼠癫痫病灶位置进行精确定位，及研究电刺激对癫痫发作的抑制效果。项目基于此新材料还研究和开发了柔性运动应变传感器，成功应用于人体运动识别等。本研究结果将推动柔性电子传感器在生物医疗领域的应用。