基于微光机悬臂梁超材料技术的高分辨率太赫兹面阵探测器

Recent years，terahertz plane array detector has become a hot spot in terahertz imaging field owing to the characteristics of no mechanical scanning, real-time imaging and so on. At present, the terahertz plane array detectors based on the electrical readout technology (such as: microbolometer array detector) have some problems in low terahertz absorptivity, device design and fabrication technology's complexity. The project studies a kind of optical readout terahertz plane array detector based on the micro-optical-mechanical cantilever technology and metamaterial absorber technology. We design novel micro-optical-mechanical cantilever metamaterial structures which avoid the traditional structure's defects such as cannot integrating the metamaterials and cantilevers can improve the detector's resolution. The detector based on the structures has high terahertz absorbtivity and multi-band terahertz response ability. To improve the detection sensitivity, reduce the thermal noise, simplify the detector's design and manufacturing complexity, and reduce the pixel spacing, improve the detector's fill factor and increase resolution, the micro-optical-mechanical metamaterial absorption theory and the metamaterial cantilever radiation thermal-mechanical dynamics theory will be studied in-depth in the project. Finally, a high resolution, real-time terahertz plane array imaging detector will be produced.

近年来，太赫兹面阵探测器以其不需机械扫描、可实时成像等特点，成为太赫兹成像领域研究的热点。目前，基于电读出的太赫兹面阵探测器（如：微测辐射热计面阵探测器）存在着太赫兹吸收率不理想、器件设计及制备工艺复杂等难点。本项目基于微光机悬臂梁技术和超材料吸收体技术，研究一种光读出的太赫兹面阵探测器。通过设计新型微光机悬臂梁超材料结构，避免了传统超材料结构不能整合超材料和悬臂梁等缺点，提高了探测器分辨率。基于该类结构的探测器具备较高太赫兹吸收率以及多波段太赫兹响应能力。项目将深入研究微光机超材料阵列太赫兹电磁吸收理论和超材料悬臂梁辐射热-机械动力学理论，在提高探测灵敏度、减少热噪声的同时降低面阵探测器设计及制备加工复杂度，并减少像元间距，提高探测器填充因子，最终制造出具备较高分辨率，能够实时成像的太赫兹面阵探测器。

由于太赫兹成像具有低辐射，安全和可穿透性的特点，近年来成为研究的热点。本项目主要研究了微光机悬臂梁阵列读出技术和超材料电磁吸收技术，并且基于这两种技术开发了一种太赫兹面阵成像探测器。.通过对微光机悬臂梁阵列技术的研究提出了一种全光减背景读出方法和开窗异或读出方法；通过对超材料电磁吸收技术的研究提出了可调控和超宽波段太赫兹吸收结构；最终加工出来了具有较高填充因子和较高分辨率的太赫兹面阵探测器。.本项目的开展使我们能够深入理解微光机超材料阵列太赫兹电磁吸收机理，同时进一步完善超材料悬臂梁辐射热-机械动力学模型，具有重要科学意义。