太赫兹人工超材料及其室温探测器应用研究

In the last few years, uncooled terahertz detectors (UTDs) were invented and have attracted considerable attention. This detecting technique is helpful for reducing the cost of manufacture, as well as impelling the theoretical studies and practical applications of terahertz. UTDs exhibit great potential in military and civilian applications. Unfortunately, both conventional devices and materials weakly absorb the photons in terahertz range, which has become the critical factor limiting the development of UTDs. In order to solve this problem, we propose a novel microbolometer, whose top layer is a special metamaterial absorber and bottom layer is a conventional L-type microbridge containing thermistor. With combining the advantages of metamaterial and L-type microbridge, the proposed microbolometer is believed able to significantly improve the device performance and lower the difficulty in manufacture, by which the special requirements of UTDs could be met. Depending on our self-developed devices, micro-process techniques and related previous studies, this project will focus on the topics of the design and manufacture of metamaterials, their property measurements, responding mechanisms, and detector integrations. This work is based on the late research fruits in the world, and it includes technical innovations as well as basically and pioneeringly theoretical studies. Accomplishment of this project is believed helpful for better understanding the metamaterials, exploring novel terahertz dectectors, and engendering important research results with self intellectual property rights, and particularly, it is also helpful for remarkably spurring the developments of two frontier sciences of metamaterials and terahertz technologies in our country.

太赫兹室温探测器是近年的国际研究热点，对于降低探测器成本、推动太赫兹理论与应用研究的发展有重要意义，有广阔的军事与民用前景。但是，常规的器件及材料对太赫兹的吸收均较弱，这成为制约太赫兹室温探测器发展最关键的技术瓶颈。为此，本项目提出一种全新的微测辐射热计：其上层为特殊的超材料太赫兹吸收器、下层为传统的含热敏材料的L型微桥。结合超材料与L型微桥两者优点，能够在降低器件制造难度的同时、显著地提高器件性能，满足太赫兹室温探测的特殊要求。本项目依靠我们现有的探测器件、微加工技术和重要的前期成果，围绕超材料设计与制造、物性测量、响应原理、探测器集成等核心问题进行系统的研究。项目的开展，借鉴国际最新的科研成果、包含科学的技术创新和前沿的基础理论研究。相信本项目的完成，将有助于深化超材料理论认识、探索新型太赫兹探测器、形成具有自主知识产权的重要科研成果，推动我国超材料和太赫兹探测器两大前沿科学向前发展。

太赫兹室温探测器集成了多种前沿技术、是近年国际关注热点，对推动太赫兹理论与技术发展有重要意义。但是，常规的器件及材料对太赫兹光子的吸收弱，制约了太赫兹室温探测器的发展。为此，本项目围绕用于太赫兹室温探测的人工超材料、热敏电阻材料、太赫兹敏感材料、太赫兹响应原理、器件集成技术等核心问题进行重点研究。研制出螺旋环太赫兹吸波器、多层宽频太赫兹吸波器、无衬底太赫兹滤波器、全介质太赫兹滤波器等多种高性能的太赫兹超材料以及氧化钒基复合膜、DAST基复合膜等多功能器件新材料等，并对其器件性能进行了系统研究，确定了合适于太赫兹室温探测器的太赫兹超材料吸波器、太赫兹超材料滤波器、热敏电阻材料等，开发出室温微测辐射热计的制造新技术。在积累了相关理论成果的基础上，我们还首次设计并制作出具有太赫兹强耦合的有机超材料、以及集成有超材料吸波器的新型太赫兹室温微测辐射热计。此外，我们还深入研究了典型材料的太赫兹响应规律、材料的化学结构、化学结构与物理性能的联系、材料及器件的基本原理与性能控制等关键基础问题，深化了理论认识。重要的是，我们研究发现了多种材料的新性能，开辟了材料的应用新领域。本项目在器件、材料、理论研究等方面均取得丰硕的创新成果，为发展高性能器件超材料、实现太赫兹室温探测创造了有利条件。期间，我们共申请了国内外发明专利6项、授权6项；正式发表了学术论文22篇（SCI收录20篇、EI收录18篇），其中JCR一区及二区期刊高水平论文达7篇。此外，还接受、即将发表SCI或EI收录期刊论文3篇；获省部级奖2项；培养了博士研究生5名（已毕业2名）、硕士研究生21名（已毕业11名）。本项目成果对于探究太赫兹超材料及太赫兹室温探测器的基本原理及技术手段、培养科研人才、推动我国太赫兹科技发展等具有重要意义。