高能激光系统超洁净制造的关键基础科学问题研究

National important project on Laser Inertial Confinement Fusion presents serious challenges on clean technologies. In this proposal, for the first time, the concept of ultra-clean manufacturing technology is put forward, and the following important scientific problems regarding theories and key technologies for ultra-clean manufacturing are to be addressed including the interfacial interaction mechanisms between precision/ultra-precision machined surface and contaminants, evolution and degradation of ultra-clean surface in the high energy laser system, machining and controlled manufacturing of ultra-clean components. An interdisciplinary framework by integrating theories and methods of machinery manufacturing, laser engineering and surface physical chemistry is employed to investigate the mechanisms of microscopic surfaces-contaminants interaction and sub-surface damages-contaminants interaction for precision and ultra-precision machined surfaces, to reveal the impact of manufacturing process and operation environment on formation and evolution of surface ultra-cleanness, to advance new methods of removing surface and sub-surface contaminants, to study the characterization techniques and establish the evaluation system for surface ultra-cleanness, and to explore the spatial and temporal evolution of surface ultra-cleanness during the practical operation of the high energy laser system. Based on this, new ultra-clean manufacturing processes will be put forward, the environment simulation platform for the high energy laser system will be established to enable experimental verification, and ultra-clean manufacturing for the high energy laser system will be realized. The research findings will not only provide key technical support for the national Laser Inertial Confinement Fusion facility, but also facilitate the progress of ultra-clean manufacturing technology in other high-tech areas.

本项目针对激光惯性约束聚变国家重大科学工程对洁净技术的迫切需求，首次提出超洁净制造技术的概念，围绕精密超精密加工表面与污染物的界面作用机理、高能激光系统中超洁净表面状态的演化规律及失效机制、超洁净表面的创成和控性制造等科学问题，开展超洁净制造的基础理论与关键技术研究。综合运用机械、激光、表面物理化学等学科的理论和方法，研究精密超精密加工表面微观形态和亚表面损伤与污染物的作用机理，揭示制造过程和使用环境对超洁净表面形成和演化的影响规律，进而探索加工表面、亚表面污染物去除的新方法，研究超洁净表面的检测技术并建立评价体系，获得高能激光系统使役过程中超洁净表面状态的时空演变规律。在此基础上，提出超洁净表面制造新工艺，建立高能激光系统环境模拟平台并进行实验验证，最终实现高能激光系统的超洁净制造。研究成果将为我国激光惯性约束聚变装置的研制提供关键技术支撑，并促进其它高技术领域超洁净制造技术的发展。

面向高功率激光装置驱动器对洁净技术的迫切需求，提出了超洁净制造的概念，根据超洁净技术的要求，从设计、制造、集成、运行和维护等关键控制点出发，围绕核心科学问题，开展超洁净制造的基础理论与关键技术的研究。综合运用机械、激光、表面物理化学等学科的理论和方法，研究精密超精密加工表面微观形态和亚表面损伤与污染物的作用机理，揭示了制造过程和使用环境对超洁净表面形成和演化的影响规律，进而探索加工表面、亚表面污染物去除的新方法，研究了超洁净表面的检测技术并建立评价标准，获得高能激光系统使役过程中超洁净表面状态的时空演变规律。在此基础上，提出超洁净表面制造新工艺，建立了高能激光系统环境模拟平台并进行实验验证，最终实现高能激光系统的超洁净制造。项目以基础科学问题研究为途径，以服务于国家重大科学装置建设为目标，开展高能激光系统中超洁净制造的基础理论与关键技术的研究，获得了对重大科学装置建设具有指导意义的成果。本项目发表学术论文103篇，其中SCI收录论文82篇，EI收录论文78篇。所发表的论文受到国内外同行的重点关注，SCI国际期刊上引用总次数达237次。本项目申请专利50项，已获得授权发明专利31项、实用新型专利16项。相关成果荣获省部级科技奖励6项。其中，荣获国防技术发明特等奖1项，省科技一等奖1项，省部级科技二等奖3项。项目组成员参与编写国际标准2项并获批。研究成果将为我国高能激光系统的研制提供关键技术支撑，并促进其它科技领域超洁净制造技术的发展。