精密直线电机系统的关键基础科学问题

As the core parts in the area of high-end manufacturing equipment, the development level of precise linear machine system is in direct relation to the quality and manufacture precision of products, and it is also an important symbol of the level of science and technology in a nation. Under the requirements of high-density integration, high thrust density, harsh limit in temperature rise, precise position servo criterion and many other limiting performance standards, the thrust analysis of precise linear machine system has complex restrictive relation among many physical field factors, such as electricity, magnetism, force, heat and so on. Meanwhile, the factors of the restriction on the control precision of velocity and position are not clear; and it is the requirement of meeting many limiting performance standards that makes the design of precise linear machine system more complex and a longer circle. This project aims to reveal the mechanism of the generation of vector thrust ripple caused by multi-physics field factors in the precise linear machine system, build non-rigid dynamical models to study the complex dynamical output behavior of this system under load; research the ultra-precision power conversion unit, high-quality current regulation and disturbance attenuation precise drive and control method. Finally, synthesize a design method that is under strong confinement, equipped with many limiting performance standards, multi-physics field synthetic analysis and multi-objects optimization to drive the development in high-end equipment manufacturing industry. In summary, the proposed work can enhance the basic research ability for precise linear machine system, and build high-tech talent, and then break the core technological monopoly to meet the needs of major national science and technology.

作为高端制造装备的核心执行部件，精密直线电机系统的研发水平直接决定产品的性能及制造精度，是国家科技水平的重要标识。在高集成化、高推力密度、苛刻温升限制及精密位置伺服指标等多种极限性能要求下，精密直线电机系统推力分析存在电、磁、力、热等多种物理场因素间复杂的制约关系，同时限制位置控制精度提高的因素尚不明确。本项目意在揭示精密直线电机系统中多物理场因素产生矢量推力波动的机理；构建非刚体动力学模型来研究该系统带载条件下的复杂动力学输出行为；研究高精度功率变换装置、高品质电流调控与扰动抑制的精密驱动控制方法。最终，形成强约束条件下，精密直线电机系统兼具多种极限性能的，多物理场综合分析理论及多目标优化设计方法，带动高端制造装备业的发展。本项目研究对于提升我国精密直线电机系统的基本理论、方法和技术水平起到带动作用，从而打破欧日的技术垄断以及提升民族核心技术产品竞争力。

本项目以光刻机、高档数控机床、智能化生产线为代表的高端制造业为应用背景，以高端制造装备中的核心部件精密直线电机为研究对象，开展精密直线电机系统基础理论及关键技术的研究，解决我国高端制造装备领域的“卡脖子”问题。.本项目揭示了直线电机中多维电磁力形成机制和电磁力波动作用机理，实现了对电机磁场的精确解析，构建了多维电磁力模型，系统性分析了齿槽、端部、脉振磁场以及绕组不对称效应对电机电磁力波动的作用机理，提出了具有高推力密度和低推力波动的初级绕组分段式直线电机结构。.在直线电机热特性研究中，建立了电机综合热网络模型，分析了电机内部温度梯度分布规律以及各因素对电机表面温升的影响规律，揭示了电机热屏蔽与冷却机理，提出了电机初级与冷却结构集成化设计方法，有效提高了直线电机的电磁负荷能力。.通过对精密直线电机寄生力的精确建模，为寄生力的在线补偿提供了理论依据，提出了基于反接串联感应电动势的一种新型抑制电涡流阻尼力的超薄型冷却结构，揭示了精密直线电机由于机械结构振荡引发推力波动的产生机理，并建立了电机初级的多刚体多自由度动力学模型。.本项目以遗传、自适应、自学习等智能算法构建了精密直线电机多目标优化函数，兼顾电磁性能、冷却性能及外形尺寸的综合约束条件，实现了精密直线电机的多物理场耦合、多目标优化的复杂性设计，解决了直线电机高推力密度、低推力波动及近零散热等极限性能共存的技术难题。.在直线电机驱动控制系统中，构建了线性开关混合驱动拓扑结构，提出了高品质预测电流调控方法，实现了直线电机精确推力控制，并通过研究直线电机系统的参数辨识技术、复合扰动抑制技术、运动轨迹规划方法、高精运动控制策略，实现了精密直线电机微纳级运动控制指标。.本项目搭建了基于旋转电机+滚珠丝杆、基于电磁阻尼器、基于重力分量法的三种直线电机性能测试平台，并制定了6项精密直线电机测试标准，规范了精密直线电机的性能测试方法。