微型抗磁性轴承稳定磁悬浮机理、非线性动力学理论与实验研究

This project aims at the research of stable diamagnetic levitation mechanism and nonlinear dynamics of the diamagnetic levitating micro-bearings in micro-electro-mechanical systems (MEMS). The complex diamagnetic force model in three-dimensional space at micro-scale and nonlinear dynamic model with coupled multiple fields (mechanical-electro-magnetic-fluid) for passive diamagnetic levitating micro-bearings are presented. The scaling effect on dynamic parameters and rotational loss mechanism at micro-scale of the diamagnetic levitating micro-bearing, loss reduction methods and nonlinear stability analysis methods for the diamagnetic levitation are investigated. The nonlinear aerodynamic damping and eddy current effects on the performance of diamagnetic levitating micro-bearing are analyzed and discussed.The effects of demagnetization inhomogeneity, magnetic asymmetry and magnetic eccentricity from micromachining on the nonlinear vibration, unbalanced responses and dynamic stability of the diamagnetic levitating micro-bearing are investigated. The methods of dynamics design of the passive diamagnetic levitating micro-bearing and the experimental analysis are proposed. The methods of dynamic test, performance sssessment and weak signal processing for the nonlinear vibrations of the micro-bearing are developed. This project nonlinear dynamics of passive diamagnetic levitating micro-bearings in MEMS, which has important theoretical significance and practical value. It can also provide theoretical and experimental basis for the dynamic performance optimization design and reliability of the micro-bearing systems, promote the discipline development of micro-rotor dynamics, nonlinear vibration and control in MEMS.

本项目旨在研究微型抗磁性轴承的稳定磁悬浮机理与非线性动力学问题，建立微尺度下无源式抗磁性悬浮轴承的复杂三维空间抗磁力模型和机-电-磁-流等多场耦合系统非线性动力学模型，研究微型抗磁性悬浮轴承动态特性参数的尺度效应、微尺度旋转损耗机理与降耗方法及抗磁悬浮非线性稳定性分析方法，研究微尺度下非线性空气阻尼和电涡流效应对抗磁悬浮轴承动力学特性的影响规律，研究退磁不均匀性、磁化不对称性和微加工磁偏心效应作用下抗磁性轴承非线性振动特性及不平衡响应的稳定性，研究无源式微型抗磁性悬浮轴承的动力学设计与实验分析方法，发展微型抗磁性轴承动态性能评估与微弱信号处理方法，对无源式微型抗磁性悬浮轴承动力学研究具有重要的理论意义与实际价值，为微型抗磁性轴承动态性能优化设计及微转子系统可靠性提供理论与实验依据，并对促进微转子动力学、微机电系统动力学与控制学科发展具有重要意义。

本项目研究了微型抗磁性轴承的稳定磁悬浮机理与非线性动力学问题，建立了微尺度下无源式抗磁性悬浮轴承的复杂三维空间抗磁力模型和机-电-磁-流等多场耦合系统非线性动力学模型，研究了抗磁性悬浮轴承动态特性参数的尺度效应、微尺度旋转损耗机理与降耗方法及抗磁悬浮非线性稳定性分析方法，研究了微尺度下非线性空气阻尼和电涡流效应对抗磁悬浮轴承动力学特性的影响规律，研究了退磁不均匀性、磁化不对称性和微加工磁偏心效应作用下抗磁性轴承非线性振动特性及不平衡响应的稳定性，研究了无源式微型抗磁性悬浮轴承的动力学设计与实验分析方法，发展了微型抗磁性轴承动态性能评估与微弱信号处理方法。本项目的研究对无源式抗磁性悬浮动力学研究有重要的理论意义与实际价值，为微型抗磁性轴承动态性能优化设计及微转子系统可靠性提供了理论与实际依据，对促进微转子动力学、微机电系统动力学与控制学科发展具有重要意义，并在国内外学术期刊上发表SCI论文12篇，申请国家发明专利并授权3项。