碳纳米管仿生连接器的制备与性能研究

To develop the novel nanoconnector applying new materials and new connection mechanism has its great significance in achieving the state of high performance and miniaturization in semiconductor industry. Based on preliminary studies, the applicant found that the gecko-feet-inspired Ge nanowire-based hybrid core/shell arrays can take advantage of van der Waals forces, induced by the mutual penetration and close contact of nanoarrays, to achieve physical connection, and make use of the shell metal material to achieve electrical connection between the two components. Through further optimization of the material and its structure,these bio-snspired nanoarrays are of great value to the development of the novel nanoconnector.This project is proposed to use plasma enhanced chemical vapor deposition technique to grow gecko-feet-inspired metallic multi-walled carbon nanotube arrays on conductive barrier layer, to study the effect of the preparation process on the nature of carbon nanotubes as well as the effect of the subsequent surface treatment on the nanotube arrays and the connector's mechanical and electrical properties and reliability, and to seek for suitable operating parameters; At the same time, it further explores the connection mechanism of the connector, ultimately, obtains nanoconnectors with selectivity, high adhesion, easy to plug, reusability, high mechanical strength, and excellent electrical and thermal performance. The project will not only be of significance to the basic research of preparation and connection mechanism of nanoconnector, but also shed some lights on the development of practical advanced connector and 3D integrated interconnects.

开发基于新材料和新连接机制的纳米连接器是当前半导体产业高性能、微型化发展的迫切需求。申请人前期研究发现，仿壁虎脚结构的锗基纳米线核壳结构阵列能利用阵列相互穿透接触形成的范德瓦尔斯力实现元件之间的物理连接、壳层金属实现电气连接，通过对材料及其结构的进一步优化有望满足上述需求。本项目拟采用等离子增强化学气相沉积技术在导电性势垒层上生长仿壁虎脚的金属性的多壁性碳纳米管阵列，研究制备工艺对碳纳米管性质的影响，以及后续表面处理对碳纳米管性质及连接器力学、电学性质和可靠性的影响，寻找合适的工作参数,并探讨连接器的作用机制，最终获得具有选择性、高黏附力、易插拔、可重复使用、机械强度高以及电学和热学性能优越等特点的纳米连接器。本项目不仅对纳米连接器的制备与工作机理有一定的基础研究意义，而且对开发实用的高档连接器、3D集成互连也有重要的参考意义。

开发基于新材料和新连接机制的纳米连接器是当前半导体产业高性能、微型化发展的迫切需求。本项目采用化学气相沉积技术在导电性硅化钴势垒层上生长多壁性碳纳米管阵列，研究了催化剂密度、势垒层厚度和生长温度对碳纳米管形貌的影响和阵列表面刻蚀处理方法，及碳纳米管/三维泡沫碳的制备工艺，获得了优化的溅射制备Fe催化剂和势垒层的生长时间分别为30秒和5分钟。采用等离子体增强化学气相沉积技术在绝缘性势垒层上制备了垂直排列的碳纳米管阵列，研究了催化剂、生长时间和功率对阵列的影响，研究了涂覆材料的厚度对碳纳米管阵列连接器的力学性能的影响，发现存Parylene厚度为50nm时黏附力最大（～100 N/cm2），相应循环测试寿命为49次。通过转移辅助技术，制备了柔性基底上的碳纳米纤维连接器，其最大切向黏附力为78 N/cm2，法向黏附力较小，表现出一定的选择性黏附；在3.6 N/cm2预压力下，循环寿命为37次。本项目的实施不仅对性质可控的碳纳米管的制备有一定的基础研究意义，而且对开发实用性的高档纳型连接器、未来3D集成互连也有重要的参考价值，将推广其在能源存储、光催化、微机械制造、医疗救治、电子封装、航天军事等领域的应用。