表面弹性波马达的机理和方法研究

Surface acoustic wave (SAW) motor is the development of the technology of electric motor and other micro special motors. It has very important theoretical value. And the SAW motor of high speed, high driving force, fast response and small size also has many potential applications in the aerospace, nano/micro, optics and precision machinery technologies. We studied the mechanism of SAW in detail, and proposed a novel method of using atomic force microscope (AFM) and beam-deflection to measure the nanometer vibration. The SAW of 6.7nm and 13MHz is reported in the experimental result. We set up the methods of designing the transducer of SAW motor, developed the SAW motor stator transducer of 50 , and stimulated the traveling SAW. We designed and fabricated the RF power amplifier, the mechanical structure, and realized the SAW motor system. We discussed the factors that affect the efficiency of SAW motor in detail, proposed the theoretical model of the operation of SAW motor, and did numerical simulation for this model. These kinds of works provide the basement for improving the efficiency of SAW motor. Finally, the transducer structure with energy circulation function was taken and improved the efficiency of the SAW motor. The threshold of driving voltage was dropped from 100V to 10V or less. When the driving voltage is 10MHz and 10V(peak-to-peak) sinusoidal wave, the amplitude of SAW is 20nm, and the no-load speed of SAW motor is 0.34m/sec, the maximum driving force is 0.06N.

本项目研究表面弹性波的传播机理, 提出表面弹性波马达的新方法. 揭示影响表面弹性波传播特性与表面弹性波马达运动特性的因素, 及相互间的定性和定量关系. 据此发展表面弹性波驱动的技术和系统, 其特点是直接由表面弹性波驱动,速度高,推力大, 步距小,响应快,易微小化. 为空间技术, 微型机光电系统及纳米技术等领域发展特种马达提供新的方法.