基于原子级厚度MoS2薄膜的仿视网膜成像集成器件可控制备研究

Retina-like imaging sensor is promising for panoramic imaging and artificial vision, etc. However, the current research can not meet the requirements of flexible, spherical conformal, spatial variable resolution imaging at same time, yet. The atomically thin MoS2 film has great potential due to its unique structure and excellent properties. Unfortunately, it still suffers from many problems: poor quality and uniformity of continuous MoS2 film, difficulty in precise control of spherical device distribution, low resolution of the integrated device based photodetector and resistive random access memory. Thus, this project will focus on the controllable fabrication of integrated retina-like imaging devices based on atomically thin MoS2 film. In details, we will study the controllable preparation of large-area high-quality MoS2 thin film, explore the method of performance control of MoS2 thin film devices. According to the requirements of spherical conformal distribution and spatial variable resolution imaging characteristics, we will design the structure of flexible imaging devices, and develop the efficient fabrication process for retina-like imaging devices based on spherical decomposition, planar devices preparation, flexible substrate clipping, peeling, transfer printing and spherical splicing. And then, the design, preparation and packaging technology of integrated devices based on photodetector and resistance memory will be explored. The sucessful implementation of this project will strongly promote the wide application of atomically thin MoS2 film in optical imaging and artificial vision, and pave the way for the design and fabrication of relevant flexible spherical devices.

仿视网膜成像传感器在全景成像、人工视觉等领域具有广阔前景，而现有研究均无法同时满足柔性、球面共形、空间变分辨率成像等要求。原子级厚度MoS2薄膜因其独特结构和优异特性呈现巨大潜力，但依然存在薄膜质量差、球面器件分布难以精确控制、分辨率低等问题。因此，本项目将围绕基于原子级厚度MoS2薄膜的仿视网膜成像集成器件可控制备开展研究。探究MoS2薄膜高质量大面积沉积技术与薄膜器件性能调控方法；针对球面共形和空间变分辨率成像要求，设计球面环形分布的MoS2柔性光探测成像器件结构，开发基于球面分解-平面器件制备-柔性基底剪裁、剥离、转印与球面拼接的仿视网膜成像器件高效制备工艺，实现球面像元分布的精确控制；并进一步研究光探测与阻变存储器件高密度垂直堆叠集成与封装工艺。本项目的开展将有力推动原子级厚度MoS2薄膜在光探测成像与人工视觉等领域的广泛应用，同时为相关柔性球面器件的设计与制造提供指导与参考。

仿视网膜光电成像器件因其大视场、空间变分辨率成像等特点在航天遥感与军事装备等领域具有广泛应用前景。然而，传统刚性硅基结构与柔性曲面共形需求矛盾突出。原子级厚度 MoS2薄膜因其超薄结构与优异特性在曲面共形集成器件中呈现出巨大应用潜力，但依然面临薄膜质量差、大面积制备困难等问题。为此，本项目提出了基于原子级厚度MoS2薄膜的仿视网膜光电成像集成器件及其制备方法。重点开展的研究工作包括：提出了一种基于电化学剥离的高质量大面积原子级厚度MoS2薄膜制备工艺，揭示了薄膜的掺杂、表面修饰、空位引入以及异质结构建等措施对 MoS2薄膜能带结构、光学性质及电子输运特性的作用机制，实现薄膜器件光探测器制备与性能调控，光响应率达到1000 A/W，响应时间小于 100μs，通过基底剪裁-转移-拼接实现了球面共形器件阵列的可控制备。提出并制备了具有典型双极开关特性的AgBiI4忆阻器，实现了高开关比(>10000)，超低工作电压(0.16 V)，长数据保持(>10000 s)，灵活性和良好的弯曲稳定性。结合各向异性二维材料（BP、MoTe2）及其异质结，构建了宽光谱响应的偏振光电探测器（响应范围520nm-1500nm），自驱动模式下响应带宽达1.3kHZ，偏振消光比达到2.09。基于本项目，取得了一系列原创性的成果，以第一或通讯作者发表期刊论文4篇，申请发明专利3项（已授权2项），本项目的实施为曲面共形成像器件的研究开辟了新思路，对促进二维材料光探测器件的发展具有重要推动作用。