纳米精度加工装备关键部件运动稳定性的基础研究

Nano-precision manufacturing machines are the essential high-value manufacturing equipment that can manufacture components in macroscopic dimensions but with the machining accuracy at nanometric level, requiring the compound motion of the long-stroke electrically actuated worktable and tool-spindle to achieve and maintain the tool-workpiece motion at the nanometer accuracy. The motion systems on current ultra-precision manufacturing machines are characterized by using aerostatic bearings and electromagnetically actuated direct drive, and the motion stability is thus greatly affected by micro disturbances from multiple sources such as the electric-magnetic field, gas-solid interaction and thermal perturbation, which is becoming a key bottle-neck challenge both scientifically and technologically in developing the ultraprecision manufacturing machines towards the nanometer accuracy. This project aims to address the immediate great challenges in developing ultra-precision manufacturing machines. Focused on the following two key scientific challenges, i.e. 1) the generation mechanism and transmission characteristics of micro multi-physics disturbances and 2) dynamic stiffness enhancement and motion stability as well as their enabling mechanism within the multi-dimensional motion chain on the ultraprecision machine, this project will carry out interdisciplinary research covering the approach, methodology and key enabling techniques, and reveal the dynamic behaviors of nonlinearly-coupled multi-physics in nano-precision manufacturing machines while particularly its two key enabling components - high precision aerostatic worktable and high speed spindle, so as to clarify the transmission characteristics of micro disturbances within the multi-dimensional motion chain and stiffness chain on the machine. Furthermore, the project will develop online measurement means and active control methods with configuration parameters for nano-precision manufacturing machines, so as to further develop the stability-oriented structure innovation theories and improve the motion stability of the machines. Research achievement of this project will facilitate development of ultra-precision manufacturing machines particularly the key enabling components - high precision aerostatic worktables and spindles both scientifically and technically, and therefore enhance the innovation and R&D capability on high-value ultraprecision manufacturing machines.

纳米精度加工装备是对宏观尺寸零件实现纳米量级加工精度的高端制造装备，要求其关键部件—长行程工作台与刀具主轴的复合运动达到并保持纳米精度。目前，这些关键部件以气浮支承和电磁驱动为典型结构特征，其运动稳定性受电、磁、气、固、热多源微扰动的影响，成为制约加工精度提升的瓶颈。本项目面向我国纳米精度加工装备的重大需求，围绕其关键部件中多物理量/场作用下微扰动的产生机理及传递规律、多物理量/场作用对系统动刚度之影响及基于动刚度增强的运动稳定性保证机制这两个关键科学问题，从共性基础和关键技术层面，通过多学科交叉融合，揭示纳米精度加工装备中多物理量/场耦合动力学行为规律，创建多维运动链-刚度链中微扰动的能量俘获和转换机制，提出状态参量在线测控新原理，建立纳米精度加工装备高稳定运动结构的创新设计理论，为我国超精密加工装备的自主研发提供基础理论和关键技术支持，提高我国高端制造装备关键基础部件的自主创新能力。

本项目以纳米精度加工装备关键部件——长行程工作台与刀具主轴为研究对象，以增强纳米精度加工装备关键部件的运动稳定性为目标，围绕加工装备关键部件中的多源复杂扰动的产生机理、传递规律、抑制方法，从理论、方法、关键技术、实验与应用等层面展开基础研究，为高稳定性的纳米精度加工装备的开发提供理论和技术支撑。项目目前已完成研究计划中的全部工作内容，建立了表征气浮支承流-固-热耦合本构关系的动力学模型，解析了气浮支承、电磁驱动中微扰动的产生机理及其传递规律，提出了气浮支承气膜压力分布连续测量与空气静压电主轴振动测试新技术。进一步针对气浮支承-电磁驱动-智能结构系统结构高刚度与高稳定性的矛盾，从内部振动传递抑制和外部振动隔离两个方面开展了稳定性增强的系统性研究。设计了俘能-传能-换能一体化的压电智能结构，形成了运动结构动刚度增强的设计方法；发明了相斥磁性负刚度的近零频率抑振、频变阻尼宽频域抑振、抑振-定位分频段协同控制等技术及系列装置，形成了面向运动装备稳定性增强的宽域近零超稳抑振技术。相关成果在纳米精度制造、超精密测量、高分航空观测、光电导引/跟瞄等领域应用，服务于航空工业、中船重工、兵器工业等多家科研院所和10余家企业，取得重大的国防和社会效益，以及显著的经济效益。