压电驱动的六自由度工作台及控制方法

Aiming at demands of automatic alignment for optical waveguide device packaging equipment in the field of the optical communication, researches on precision automatic adjusting system with six degrees of freedom actuated by non-resonant piezoelectric motor will be carried out in this project. The existing six DOF stages adopt magnetic servo motor as their driving source and stages are pushed via gear system, which makes higher precision and faster response difficult to obtain. In this project, a parallel-series hybrid mechanism with six degrees of freedom system actuated by non-resonant piezoelectric motor, which features with long stroke, fast response and high precision under multi-modes of operation, will be investigated. To find the rulers for structure optimization and performance estimation of non-resonant piezoelectric motor, a nonlinear dynamic model allowed for coupling of multi-physic fields will be established, and the electronic driver and topological structure of six degrees of freedom adjustment stage will be proposed according to the characteristics of non-resonant piezoelectric motor. The investigation on error model of movement in soft guiding mechanism will be conducted and the corresponding control strategy of six DOF systems adopting this mechanism will be designed. The motion control algorithm in the condition of double feedback signal input of the six degrees of freedom actuating system will be investigated, as well as its control software and system integration design method. The result of this project is going to provide effective solutions of improving accuracy and production efficiency of the optical waveguide device packaging equipment, and provide technical support for integrated optical device manufacturing industry.

针对我国光通信领域中关键装备波导器件封装设备的自动化对准耦合的需求，开展非共振压电电机作动的六自由度精密自动调整系统的研究。现有六自由度工作台系统采用电磁伺服电机经滚珠丝杠推动工作台运动，精度难以进一步提升。本项目提出可工作在多模式下具有大行程、快响应和高精度特点的非共振压电电机作为含串并联混合机构的六自由度系统的作动器；建立该非共振压电电机在多场耦合条件下的作动系统非线性动力学模型，为电机结构优化和性能预估提供依据；根据非共振压电电机的特性设计驱动器和六自由度调整台的拓扑结构；研究柔性导向机构系统的运动误差模型，设计相应控制策略；研究双重反馈信号输入下六自由度作动系统运动控制算法，设计控制软件，进一步研究系统集成化设计方法。本项目的研究成果将为提高光波导器件封装设备的精度和生产效率提供有效的解决方案，并为集成光学器件制造产业的发展提供技术支撑。

针对我国光通信领域中关键装备波导器件封装设备的自动化对准耦合的需求，开展非共振压电电机作动的六自由度精密自动调整系统的研究。现有六自由度工作台系统采用电磁伺服电机经滚珠丝杠推动工作台运动，精度难以进一步提升。本项目系统的研究了新型非共振式压电直线电机的运动机理、机械结构、驱动设计以及系统集成方面的关键科学技术问题，在此基础上提出六自由度定位平台可工作在多模式下具有大行程、快响应和高精度特点的非共振压电电机作为含串并联混合机构的六自由度系统的作动器，创新性的设计了基于大行程柔性铰链的并联3自由度精密定位平台，构建了串并混联六自由度精密定位平台的运动学与动力学模型，并对压电电机驱动的六自由度平台开展了运动性能测试实验，实验结果表明该定位平台具有完整的六自由度运动功能，能够实现连续作动和步进作动两种运动模式，直线运动最小定位精度可达1μm，旋转运动最小定位精度可达0.6μrad。本项目的研究成果将为提高光波导器件封装设备的精度和生产效率提供有效的解决方案，并为集成光学器件制造产业的发展提供技术支撑。