新型多元掺杂碳基薄膜的结构设计及多环境摩擦适应性研究

The amorphous hydrogenated carbon (a-C:H) film shows important application prospect in the field of advanced technology because of its high hardness, stable chemical properties, ultra low friction coefficient as well as the wear rate, and etc. However, the tribological properties of the film are environmental sensitivity, which restrict its practical use. The a-C:H film doped with weak carbon-bonded metal Ag and non-metallic element Si will be prepared by magnetron sputtering accompanied with radio frequency plasma enhanced chemical vapor deposition in this project. Combined with self-lubrication property of Ag and chemical activity of Si, the project is aimed at improving the tribological properties and frictional adaptability of the film in multi-environments. Firstly, the existing format and influence of the two doped elements on the microstructure and mechanical properties of the film will be analyzed. Secondly, the tribological properties of the doped film in various environments will be investigated, the coupling effects combined with the inner structural transformation of the film and the outer factors (such as environmental parameters, frictional condition, counterparts and so on) will be discussed as well. Thirdly, the wear mechanisms related with them will be explained, and the key factors affect the tribological properties of the film in multi-environments will be proposed. Additionally, the relationship among the microstructure, mechanical properties and tribological properties of the film in multi-environments will be revealed. The result of this project will provide theoretical reference and research idea for the development of a-C:H film with self-lubrication in multi-environments.

非晶碳氢（a-C:H）薄膜以其高硬度、稳定的化学性质、超低的摩擦系数和磨损率等优点，在高新技术领域显示了重要的应用前景，但薄膜摩擦学行为的环境敏感性，制约了它的实际应用。本项目拟采用磁控溅射结合射频等离子增强化学气相沉积技术，制备弱碳金属Ag、非金属Si共掺a-C:H薄膜，利用Ag的自润滑性能以及Si的化学活性，改善薄膜在不同环境中的摩擦学性能，提高其多环境摩擦适应性。研究Ag、Si在薄膜中的存在形式及其对薄膜微观结构、力学性能的影响；考察掺杂薄膜在不同测试环境中的摩擦学行为，探讨摩擦过程中薄膜的内部结构转变和外部因素（如环境参量、摩擦条件、接触对偶等）的耦合作用；阐明薄膜在不同测试环境中的摩擦作用机理，提出影响薄膜多环境摩擦适应性的关键因素，揭示薄膜的微结构—力学性能—多环境摩擦学性能之间的作用关系。本项目的研究结果将为开发多环境摩擦自适应的a-C:H薄膜提供一定的理论参考和研究思路。

非晶碳氢（a-C:H）薄膜以其高硬度、稳定的化学性质、超低的摩擦系数和磨损率等优点，在高新技术领域显示了重要的应用前景，但薄膜摩擦学行为的环境敏感性，制约了它的实际应用。本项目采用磁控溅射结合射频等离子增强化学气相沉积技术，制备了弱碳金属Ag、非金属Si共掺a-C:H薄膜，利用Ag的自润滑性能以及Si的化学活性，改善薄膜在不同环境中的摩擦学性能，提高其多环境摩擦适应性。结果表明：Ag在薄膜中以单质形式存在，Si可以与C成键，并且促使了sp2C 向sp3C 碳的转化，提高了薄膜中sp3CH的含量。随着薄膜中Si含量的增加，薄膜的硬度增加。Ag、Si的掺入提高了薄膜在不同气氛、不同湿度、不同温度、不同溶液中的摩擦适应性。其中，高硬度和韧性是维持薄膜在大气环境中优异摩擦学性能的因素，而Ag对提高薄膜在中低温环境中的摩擦学性能有重要作用，Si是提高薄膜在溶液中摩擦学性能的关键。Ag、Si的共掺提高了a-C:H 薄膜的耐电化学腐蚀性能。此外，类似元素的二元复合也可提高薄膜的多环境摩擦适应性，这为应用于高新技术领域的具有多环境摩擦适应性的润滑薄膜的设计提供了理论依据和技术支持。