非晶碳基多元复合薄膜的载流功能设计与摩擦磨损机理研究

The development of the electromechanical system towards to the miniaturization and high precision requires the sliding electric contact materials have excellent electrical property , low-friction and high wear resistance. The amorphous carbon films have been widely used in all kinds of transmission machine because of their excellent anti-wear and self-lubricating performance. Due to urgent need for the good sliding electric contact materials of the electromechanical system in high-tech industry and the insufficient research on the tribological behavior of the amorphous carbon films under current carrying, the project puts forward to the research and development of the amorphous carbon films for the electric contact application. Firstly, the amorphous carbon multi-composite films with good electrical property and excellent self-lubricating performance will be prepared on Cu or Al and their alloys using the complex physical vapor deposition, and the structure and composition of film can be controlled by optimizing process and parameters. The relationship between the composition and structure of the films and the tribological behavior under current carrying is studied systematically. The current-carrier tribological mechanism of the amorphous carbon multi-composite films is revealed by analyzing the evolution in surface structure and the tribochemical reaction. At last, the guideline for preparing the amorphous carbon multi-composite lubricating films used under current carrying condition will be deduced.

机电系统的微型化与高精度发展要求滑动电接触材料具备优良的电学特性和低摩耐磨性能。非晶碳基薄膜具有非常优异的抗磨与润滑性能，在各种传动机械中已得到广泛应用。鉴于高科技行业中机电系统对高性能滑动电接触材料的迫切需要和非晶碳基薄膜材料载流摩擦磨损理论研究的缺乏，本项目拟开展载流用非晶碳基薄膜的研究与开发工作。首先采用复合物理气相沉积技术，通过优化工艺和参数调控薄膜的组成与结构在电接触材料Cu或Al及其合金基体上制备出具有良好电学特性和自润滑性能的非晶碳基多元复合薄膜。系统研究非晶碳基多元复合薄膜的组成和结构与载流摩擦磨损行为之间的关系，通过分析表面结构演变与摩擦化学变化特点揭示薄膜的载流摩擦磨损机理与机制，并最终提出载流摩擦用非晶碳基多元复合薄膜的设计制备原则。

机电系统的微型化与高精度发展要求滑动电接触材料具备优良的电学特性和低摩耐磨性能。非晶碳基薄膜具有非常优异的抗磨与润滑性能，在各种传动机械中已得到广泛应用。鉴于高科技行业中机电系统对高性能滑动电接触材料的迫切需要和非晶碳基薄膜材料载流摩擦磨损理论研究的缺乏，本项目拟开展载流用非晶碳基薄膜的研究与开发工作。主要工作包括：一、采用复合物理气相沉积技术，通过优化工艺和参数调控薄膜的组成与结构在金属或合金基体上制备出具有良好电学特性和自润滑性能的非晶碳基多元复合薄膜（Pure DLC、H/DLC、Ti/DLC、Cr/DLC、WC/DLC、Cu/DLC）。系统研究非晶碳基多元复合薄膜的组成和结构与载流摩擦磨损行为之间的关系，研究结果表明，Cr/DLC与WC/DLC在有不同电流通过时均出现不同程度的磨穿现象，而H/DLC出现了不导电的情况。与Ti/DLC相比，Pure DLC和Cu/DLC在载流下薄膜摩擦系数明显低于不通电的情况。通过分析表面结构演变与摩擦化学变化特点揭示通电条件下，Pure DLC和Cu/DLC更容易在对偶上形成转移膜，从而显著降低摩擦系数。二、离子液体润滑下非晶碳膜的载流摩擦学行为及摩擦磨损机理研究，得出结论：在载流摩擦条件下，离子液体与非晶碳基固液复合薄膜具有比纯的非晶碳基薄膜更低的摩擦系数，但是其耐磨性能不如纯的非晶碳基薄膜。另外，对 MoS2基自润滑薄膜与不同摩擦副在不同载流条件下对磨的摩擦学行为及摩擦磨损机理做了简单研究。