波瓣式微壳体振动陀螺结构设计理论及其制造方法研究

High performance micro gyroscopes, as the basic core devices in inertial navigation and attitude measurement systems, have very important applications. Micro hemispherical resonator gyroscope became one of the most promising gyroscopes due to its highly symmetrical structure, and was extensively concerned in recent years. However, the performance of the hemispherical resonator gyroscope is sensitive to the micromachining imperfections. The current micromachining process is hard to satisfy the design precision. Aiming at the mentioned problems, a novel micro shell resonator, as is called waved petal micro gyroscope, is proposed. The gyroscope has an improved structural robustness, because its precision is determined by the larger size of symmetric periodic characteristics compared to structural imperfections. Thus, it is easier to be satisfied. We focus on the fundamental theory and key technology such as structural design, micromachining method, periodically evolution regular and optimization method of the waved petal micro gyroscope. The main research contents are listed as follows: (1) Structural design and modeling of the waved petal micro shell resonator gyroscope; (2) Evolution regular and optimization method of the waved petal micro shell resonator structure; (3) Study on the micromachining method of the waved petal micro shell resonator structure; (4)Signal processing and performance characterization of the waved petal micro gyroscope. The structure design theory and micromachining method of the waved petal micro gyroscope would be obtained after the study. It will provide a novel idea and method for realizing high performance gyroscopes.

高性能微陀螺是惯性导航和姿态测量系统的基础核心器件,具有非常重要的应用价值。微半球陀螺因其高度对称的敏感结构成为最具发展潜力的微陀螺之一，是近年来研究的焦点和热点。但其对加工误差非常敏感，目前的微加工精度难以满足要求。针对上述问题，项目拟探索一种能够提高敏感结构自稳定性的微壳体结构--波瓣式微壳体结构。通过敏感结构周期化将精度控制转换为特征尺寸更大的周期对称性，大大降低了谐振结构对相对加工精度的要求。项目重点围绕其结构设计理论、制造方法、周期性演化规律与优化方法等基础理论与关键技术开展研究。主要研究内容包括：(1)波瓣式微壳体振动陀螺敏感结构设计与建模；(2)波瓣式微壳体谐振结构演化规律与优化方法；(3)波瓣式微壳体谐振结构制造方法研究；(4)波瓣式微壳体谐振结构测控技术与样机验证。通过研究，掌握波瓣式微壳体振动陀螺的结构设计理论与制造方法，为实现高性能微陀螺提供一种新的思路和方法。

陀螺仪是测量运载体相对于惯性空间角运动的传感器，是惯性导航和姿态测量系统的基础核心器件。在精确制导、无人系统、稳定平台等领域具有非常重要的应用价值。陀螺仪的综合性能和成本是决定其发展方向的根本。微半球陀螺具有体积小、成本低、可靠性高等显著特点，是最具发展潜力的微陀螺之一，成为近年来研究的焦点和热点。. 半球壳类陀螺的高性能归根于高度对称的敏感结构，对制造精度要求非常高。然而，随着体积的减小，相对制造误差会显著增加，微陀螺性能提升受到很大制约。针对上述问题，项目提出了一种能够提高敏感结构自稳定性的微壳体谐振结构（波瓣式微壳体结构）。该结构充分利用半球壳体振动陀螺的优点，并通过敏感结构周期化设计，使得敏感结构的刚度和质量沿圆周呈周期性变化。使其工作模态刚性轴稳定性大大提高，显著降低了结构误差（如结构缺陷、厚度误差、不均匀性、温度变化等）对微陀螺工作模态稳定性的影响。. 本项目主要围绕波瓣式微壳体振动陀螺的结构设计理论、制造方法、测控技术等基础理论与关键技术开展研究。重点完成了波瓣式微壳体谐振陀螺三维结构动力学建模与分析，优化了敏感结构尺寸参数。优化后的波瓣式微壳体谐振结构直径为4mm，波幅为0.2mm，谐振频率约为10kHz。研究了熔融石英微壳体结构软化动力学及变形机理，掌握了温度、压力场以及约束力不均匀等因素对波瓣式微壳体结构制造误差的影响机理。自主搭建了基于高温成型工艺的波瓣式微壳体谐振结构加工平台，对火焰温度、旋转速度、加热时间、压力差等关键工艺参数进行了实验研究与工艺参数优化，并实现了谐振体结构面形、表面加工质量等几何量参数的测量。搭建了波瓣式微壳体振动陀螺的接口电容、模态测试系统，实现了静态电容、模态频率、品质因数、衰减时间等参数的测量。研制了波瓣式微壳体谐振陀螺测控电路，完成了原理样机研制。实现了预期研究目标。