有表面微结构的硅红外探测新材料（黑硅）的研究

In recent years, there are great interesting on the structure and.opto-electronic properties of surface microstructured silicon which formed by.femtosecond laser assistant etching. In this project, we built up a experimental.setup of microstructuring silicon surface using femtosecond laser. Silicon sample.with micrometer-sized spikes forest on the surface was built successfully in large.size as 2 × 2cm2. The relationship of the microstructure with experimental.conditions was investigated in detail. The optical absorption properties of.microstructured silicon wafers were investigated from near ultraviolet to near.infrared. The special surface microstructure and anomalous optical absorption properties show that the microstructured silicon possess great potential applications in many aspects such as solar cells, field emitters, and opto-electronic detectors etc.

由于普通硅对波长大于1μm的光吸收很少，致使硅光探测器不能用于对红外光的探测。国际上最新的实验结果证明，利用飞秒激光微构造硅表面，可使材料对0。25μm至2。5μm的光负跞课铡＝⒎擅爰す馕⒐乖旃璞砻婕际酰芯课⒐乖毂砻娴男翁氩牧瞎馕铡⒐獾绲嫉墓叵担呕牧隙院焱夤獾南煊Γ票父吡槊舳裙杌焱夤馓讲馄骺傩碌耐揪丁