基于黑硅吸收层的多层组合纳米膜红外探测器及其气体检测技术

Because of the numerous accidents caused by leakage or overdose of gas and the natural disaster's prevention and alarm, it has been become an important task for research. However, it is the key point to study a new style of high sensitive gas sensor and to realise the gas detection technology. The project aims to develop a novel detector based on the multi-layer composite nanometer thin films, and a new-type IR optical gas sensor which is used of the active thin film detector and the reference thin film detector. The IR gas sensor is respected to work in the normal temperature without refrigration and has multiple spectral and high sensitive detection performance. We take the methods of sol-gel to fabricate the multi-layer thin film with PT/PZT/PT～PT/PZT/PT structure on SOI substrate, and which is upturned to 180 degree as the sensitive element. Meanwhile we take the methods of bonding to bond a high thermal impedance substrate with the sensitive element, and etch in turn the down layer silicon and oxided silicon on SOI substrate. Finally, We fabricte the silicon on the top layer of SOI as the black silicon absorption layer with the sharp conical spike and forest structure. Accordingly, we obtain a novel sensitive component.The main piont of this project aims to reveal the sensitive mechanism of the black silicon absorption layer and the composite thin film, develop the manufactureing process technology of these structures, break through the integration and detection technology of the sensitive elements, the light filter and the multi-times folded and reflex optical gas cell, this research is expected to provide a solid theoretical foundation and strong technical support for the miniaturization technology, integration technology and batch production technology of the IR thin film gas sensors.

因气体泄漏或过量等引起的各种事故以及自然灾害的预防和预警，已成为人们研究的重要任务，因而研究新型的气体传感器，实现对气体的高灵敏检测是解决本问题的关键。本课题旨在研究基于黑硅吸收层的多层纳米膜探测器及其集参比波长与检测波长为一体的新型光学气体传感器，预期它能在常温下工作，且具有多光谱、高灵敏的检测性能。主要是利用SOI材料作基底，采用溶胶-凝胶技术制备多层组合结构的纳米薄膜（PT/PZT/PT～PT/PZT/PT）作敏感元件，采取金属键合技术，将敏感元件翻转与另一高热阻抗基底对接键合，然后腐蚀SOI上的底层硅和氧化硅，最终将SOI材料上层硅制备具有锥状森林结构的黑硅作为吸收层，从而得到一种新颖的敏感元件。课题重点深入开展高检测性能的薄膜结构和黑硅吸收层的加工工艺及其敏感机理研究，突破敏感元件与滤光片、多反射折叠光路气室的集成检测技术，为实现气体传感器微型化、集成化与批量生产奠定技术基础。

在国家青年基金的支持下，申请者建立了红外光学气体传感器的探测器理论模型及双光路光学吸收法气体检测系统模型，研究获得了多路折叠光路集成气室结构的设计原则，完成了光学气室的仿真设计，研制获得了具有高聚光性能的多次反射式镀金气室结构，实现了微型结构长光程的检测方法。采用溶胶-凝胶法研究并制备了三种不同的PZT薄膜式敏感结构，并对所制备薄膜的性能进行测试，试验结果表明，多层复合组合薄膜（PT/PZT/PT～PT/PZT/PT）对于应用于热红外探测器具有更好的应用前景。提出了基于黑硅的自吸热（光-热-电转换）的纳米森林结构，探索了材料、形貌、尺寸参数与吸收性能的关系，建立了相关的解释模型；发明了金属铝诱导等黑硅纳米森林结构制备方法，研制了具有强红外光吸收率的纳米森林结构。也研究基于钽酸锂晶体晶片式红外探测器的响应模型、敏感结构及机理，搭建了器件的标测系统，研究了红外探测器及其传感器检测系统样机，建立了气体浓度的多参数修正的计算函数模型，为光学窄带光谱吸收法的气体传感器在微型化、集成化与高灵敏检测方面提供了一定的技术参考和理论基础。. 共发表学术论文19篇，其中SCI收录6篇，EI收录3篇；参与国际国内学术会议5次，其中NEMS 2015、Transducers 2015各1次；申请发明专利9项，已获授权3项；培养研究生7名，其中已毕业研究生3人；部分成果是山西省技术发明一等奖（排名第2）的重要组成部分；出版学术专著1部,获得软件著作权1项。