一种新型三维纳米测头的理论及关键技术研究

Ultra-precision measurement technology, especially nano-measurement is the research frontier in current measurement technology. The development of three-dimensional probe system with nano-scale measurement accuracy, used to the high-precision three-dimensional geometric measurement of precision parts, microelectronic circuits, MEMS devices and so on, has an important significance. In the project the new sensing technology is used into the 3D trigger probe system. The key theories and technical issues include the three-dimensional high-precision measurements model based on fiber Bragg grating, the probe ball head preparation, the effect of nano-scopic force, the system-wide accuracy modeling and error correction, the nano-scale precision calibration experiments. The combination of fiber Bragg grating sensor and nano coordinate measurement, which has advantages of high sensitivity, wide linear range, small size and good adaptability to environment, is innovation and feature of the project. The study of the new type of nano-level precision 3D touch trigger probe system (1nm of resolution, 50nm of uncertainty, less than 1mN of measured force) provides a theoretical basis for practicality of nano-probe system, and open up a new way for the development of nano-scale three-dimensional probe system.

超精密测量技术特别是纳米测量是当前测量技术研究的前沿领域，研制具有纳米级测量精度的三维测头系统，解决精密零件、微电子电路、MEMS器件等领域的高精度三维几何尺寸测量难题，具有十分重要的研究意义。本项目应用新型传感技术，研制基于光纤布拉格光纤（FBG）的新型触发式三维测头系统，研究并解决其达到纳米级测量精度的关键理论及技术问题，包括光纤布拉格光栅三维高精度测头模型、探针球头制备、纳观作用力影响、全系统精度建模与误差修正、以及纳米级精度标定实验等。项目特色在于将灵敏度高、线性范围宽、体积小且环境适应性好的光纤布拉格光栅敏感器件与纳米测量相结合，研究一种新型的纳米级精度三维触发式测头系统（分辨率1nm，不确定度50nm，测力小于1mN），为纳米测头的实用化提供理论依据，为开发纳米级三维测头系统开辟一条新的途径。

微纳米测量技术是当前测量技术研究的前沿领域，研制具有纳米级测量精度的三维测头系统，解决精密零件、微电子电路、MEMS器件等领域的高精度三维几何尺寸测量难题，具有十分重要的研究意义。本项目应用新型传感技术，完成了光纤布拉格光纤（FBG）的新型触发式三维测头系统的研究，包括光纤布拉格光栅三维高精度测头模型、纳观表面作用力影响、光纤布拉格光栅三维高精度信号感测与解调技术、精密探针球头制备、全系统精度建模与误差修正、以及纳米级精度标定实验等。研制的新型纳米级三维触发式测头系统分辨率1nm，测力小于1mN，单向不确定度指标最大58nm，高质量探针球头直径约80um，真球度约0.8um，偏心度约0.6um。该光纤布拉格光栅三维触发式纳米测头的研制为开发纳米级三维测头系统开辟了一条新的途径，为纳米测头的实用化提供了理论和实践依据。