大量程高速光栅纳米测量传感机理及关键技术研究

Nanoscale displacement measurement technology is a primary technology driver in precision engineering, and grating transducers are promising tools.The project is proposed to solve the technical dilemma that is nanoscale measurement accuracy with high speed. Refering to the interferometer phase modulation technology. PZTs are employed to modulate the displacement to the grating transducer output signal phase change, high speed measurement can be realized with output signal phase demodulation, and a single output signal can achieve measurement results and identify the signal direction, avoiding the DC offset and amplitude fluctuations which reducing the measurement accuracy. Error compensation technique is an effective way to acquire precise measurement results, the nanoscale grating transducer output signals contains many coupled errors, and the error comprehensive compensation medel under nanoscale measurement can be established by designing multi-parameter detecting system with understanding error generation and transfering rule. Multi-parameter signal processing methods should be solved to ensure the measurement speed and credibility. The proposed project aim to a new principle of grating transducer with nanoscale measurement, and develop the practical nanoscale grating transducer for precision engineering.

跨尺度纳米位移测量技术是超精密工程发展的重要基础，光栅传感器跨尺度测量备受关注。针对光栅深纳米（≤10nm）测量技术面临的测量精度与测量速度难以兼得困局，提出本项目研究。借鉴激光干涉测量原理，利用PZT调制将被测位移转换为测量信号相位变化，利用相位解调技术实现高速测量，单路测量信号即可实现精密测量与辨向，规避当前光栅测量技术辨向误差与直流漂移、幅值波动对深纳米测量精度的影响。误差补偿技术是实现低成本高精度测量的有效途径，光栅深纳米精度测量误差因素众多且相互耦合，研究各项误差生成与传递规律，设计多参数检测系统，进行纳米精度下的光栅传感器误差解耦与建模，研究误差在线综合补偿方法。利用FPGA技术研究多参数信号在线处理方法，保证信号处理的高速有效。本项目综合误差补偿技术与现代电子技术，突破现有光栅精密测量原理，研制具有较强工程应用价值的光栅纳米测量传感器。

跨尺度纳米位移测量技术是超精密工程发展的重要基础，在超精密加工、半导体测试、SPM等领域需求广泛。光栅传感器是实现跨尺度纳米测量的重要技术途径。本项目借鉴激光干涉测量原理，利用PZT调制将被测位移转换为测量信号相位变化，利用相位解调技术实现高速测量，单路测量信号即可实现精密测量与辨向，规避当前光栅测量技术辨向误差与直流漂移、幅值波动对深纳米测量精度的影响。研究光栅深纳米精度测量误差间的相互耦合与传递规律，进行纳米精度下的光栅传感器误差解耦与建模，研究误差在线综合补偿方法。本项目研制的光栅位移传感器样机的测量分辨力优于0.1nm，且信号较激光干涉仪稳定；成功研发了基于FPGA的正交信号误差实时补偿模块，可用于光栅传感器、干涉仪信号的高精度处理。该项目为光栅纳米测量技术提供了技术支撑，具有较强工程应用价值。