新型光栅纳米传感系统及关键技术研究

Nanometer measurement sensor is an important part of the nanometer technology.The laser interferometer, capacitance sensor, SPM and other typical nano sensing system does not favor with manufacturing, control system integration, and the price is expensive.This project aims to study the low cost, large range of grating nanometer sensing system and its key technology.Using commercial optical astigmatic principle of three beam DVD laser head as the research foundation,modified DVD read head structure,substitute PZT for voice coil motor driven lens,study of system identification, PID control algorithm and the hysteresis compensation method,research and development nano measurement system based on the focus error signal ( FES ),and the system's read head and the grating is easy to aim. Using deep nanometer resolution focus error signal on the grating period morphology directly read and gain grating displacement information; Real-time monitoring grating displacement direction based on three optical beam focusing corresponding output signal difference; development of the FES signal and measurement system for nanometer calibration system; design system's precision drive and detection circuit based on FPGA, realizes the measurement and error of high speed signal processing; development of new nanometer grating measurement system.

纳米测量传感器是纳米科技的重要组成部分。目前激光干涉仪、电容传感器、SPM等典型纳米传感系统不利于与制造、控制系统集成，且价格昂贵。本项目旨在研究低成本、大量程新型光栅纳米传感系统及其关键技术。以商用光学象散原理的三光束DVD激光头为研究基础，改装DVD读取头结构，用PZT替换音圈马达驱动聚焦物镜，研究系统辨识、PID控制算法以及迟滞补偿方法，研发基于聚焦误差信号（FES）的纳米测量系统，且该系统具有读数头与光栅易于对准的实用性。利用深纳米分辨率的聚焦误差信号对光栅周期形貌进行直接读取，获得光栅位移量信息；基于三光束聚焦对应输出信号差异进行光栅位移方向的实时监测；开发对FES信号与测量系统的纳米标定实验系统；设计基于FPGA的系统精密驱动与检测电路，实现测量与误差信号的高速处理；在此基础上，研制新型纳米光栅测量系统。

纳米测量传感器是纳米科技的重要组成部分。目前激光干涉仪、电容传感器、SPM等典型纳米传感器系统不利于与制造、控制系统集成，且价格昂贵。本研究旨在研究基于DVD自聚焦原理的新型实用化纳米级光栅位移传感器及其关键技术，为微纳米测量提供低成本、高精度传感器，推动光栅精密测量技术不断创新发展。.本课题利用技术成熟的商业化DVD系统结构，改装DVD读取头结构，用PZT替换音圈马达驱动聚焦物镜；研究系统辨识、PID控制算法以及迟滞补偿方法，研发高精度自聚焦测量系统以及基于FES信号的纳米测量技术，该方法可实现读数头与光栅面之间的自适应读数，大大降低了高精度光栅测量中读数头相对光栅尺对准误差对测量结果的影响。同时该读数方法利用激光头锁轨信号，突破传统辨向方法，提高了测量精度。开发对FES信号与测量系统的纳米标定实验系统；设计基于ARM的系统精密驱动与检测电路，实现测量与误差信号的高速处理。本课题最终研制光栅位移传感器的主要技术参数为：位移测量范围：40mm；测量重复性：10nm；系统分辨率：1nm。