高使役性能微结构的微细铣削工艺数据体系研究

The dimensional precision and surface quality of the microstructures, typically the slow-wave structure in terahertz, X-ray arrayed grating in deep space exploration and micro flexible parts in inertial navigation, have decisive influence on their performance and reliability of service. However, for lack of machining technology data, and more inportantly, lack of integrated machining data system, the existing micro machining techniques could not meet the requirements for their high service performance. On the basis of the previous researches on the design and fabrication of diamond micro-milling tools, this project will have a systematic investigation on the high-precision micro-milling technology to fabricate the multi-material and high service performance microstructures with characteristic width of 0.02mm-0.2mm and high depth-to-width ratio. The project will carry out the fundamental researches on key scientific issues including the mechanism of material anisotropy impacting on the material deformation in micro-milling under micro-scale and the construction of micro-milling data system. The project will investigate on the mapping relations between machined surface quality of microstructure and its service performance, the formation mechanism of the micro-milling surface, the evaluation and characterization of service performance of the typical microstructures, the construction of micro-milling data system and so on. The project will make breakthrough in the key technology of micro-milling for the high service performance microstructures, and will finally construct the database for micro-milling of the typical microstructures mentioned above to achieve high service performance, which in turn, will supply fundamental theories and data supports to the micro-milling process of multi-material microstructures with high service performance and also the design and manufacturing of micro-milling tools.

太赫兹慢波结构、深空探测X射线阵列光栅、惯导微小挠性零件等微结构的尺寸精度、表面质量对其使用性能和服役可靠性具有决定性的影响，现有微加工技术手段尚不能达到其高使役性能的要求，不仅缺乏基础数据，更缺乏完整的数据指标体系。在前期超硬微铣刀设计制造研究基础上，本项目拟系统研究特征宽度在0.02mm-0.2mm的典型材料高深宽比微结构高使役性能的高精密微细铣削技术。提出以探索微观尺度下材料各向异性对微细铣削加工表面的形变影响机制、微细铣削工艺数据体系建立等关键科学问题为基础；研究微细铣削加工表面状态与微结构使役性能的映射关系、高精密和超精密微细铣削加工的表面形成机制、典型微结构使役性能的评价与表征、微细铣削工艺数据库构建等内容；突破高使役性能微结构微细铣削加工工艺这项关键技术；最终形成典型材料微结构精密微细铣削基础数据库，为深入研究高使役性能微结构的微细铣削与微铣刀设计制造提供基础理论与数据支持。

在国防、航天、能源及医疗等领域的尖端设备中，需要在很多关键零件上加工出特征尺寸为0.02mm-0.2mm的微结构，而微结构表面形貌和加工变质层等表面完整性的优劣直接影响微结构相关的技术指标，并决定了微结构使役性能。针对特征尺寸为0.02mm-0.2mm的高使役性能微结构难加工以及工艺应用问题，本项目通过构建高精密微细铣削工艺数据体系，形成大长径比金刚石微铣刀的制备方法及建立微细铣削工艺优化模型，使典型微结构的尺寸精度和表面粗糙度稳定达到100nm以下，并进行了微细铣削工艺数据库的构建，为典型材料的微细铣削加工提供工艺整体解决方案。主要研究内容如下：.（1）进行了多材料典型微结构高精密微细铣削理论基础研究，探明了微细铣削的表面形成机制，分析了金刚石微铣刀的刀具磨损过程和机理。.（2）研究了大长径比微铣刀的设计方案，提出了PCD/CVD金刚石大长径比微铣刀的3种制备方法，利用自制的金刚石微铣刀研究了多种材料微结构的加工工艺并制备出相应的样品。.（3）对微细铣削工艺进行了建模仿真，研究了微铣刀各结构角度对切削性能和表面质量的影响，针对微结构使役性能要求提出了高精密微细铣削工艺数据体系，完成了微细铣削数控软件及工艺数据库系统的开发。