基于离子液体介电润湿效应的阵列式液体透镜自共相技术研究

The co-phase modulation of traditional multi-mirror system are commonly implemented by micro-distance adjusting instrument and wave-front sensor, the complex structure makes it difficult to adjust the co-phase. This project aims at the accomplishment of simple and active higher accuracy co-phase segment for multi-small-lens system by employing the electrowetting-based ionic liquid lens array. Based on the Electrowetting and Fourier optics theories, the physical model of co-phase modulation system will be built to optimize the design of lens structure and array configuration, investigate the response properties of electrowetting-based ionic liquid lens, and improve the capabilities of adaptive co-phase modulation system. The lens devices and control circuits will be developed to reach the wide spectrum, fast response and ultra-high precision, whose performances are tested and compared with theoretical model and simulation results. The relative co-phase modulation test platforms will be built to test the phase modulation ability, and examine the ability and precision of co-phase modulation for the confocal transmission electrowetting-based lens array. The adaptive co-phase technique of electrowetting-based liquid lens array facilitate co-phase with the precision of λ/10 in millisecond, which provide a new method for phase modulation of multi-small-lens system. It is hope that this technology will great simplify the configuration and enhance the quality of the interferometric imaging system.

传统拼接子镜共相需要高精度微位移调整机构、波前传感等，结构复杂、共相调节难度大。本项目采用离子液体透镜自共相技术实现简洁、主动式高精度子镜共相拼接。借助介电润湿、范西特-泽尼克及傅里叶光学理论，建立片上干涉成像以及位相调制模型，对离子液体透镜阵列构型及内部结构进行仿真优化设计，揭示电调谐作用下液体透镜自共相能力与双液体界面位移及面型变化规律，探索提升自共相能力的方法与依据。研制宽谱段、快速响应、高精度自位相调节三液体双变焦透镜元件及调相控制电路，进行元件调相性能测试，验证模型及仿真结果。研制透射式、共焦面的离子液体透镜阵列相位调节能力测试平台，进行系统调相能力测试，验证相位调节能力及相位调节精度。液体透镜阵列自共相技术可在ms内实现λ/10级自共相精度，为拼接子镜共相调节提供一种新方法，且应用于片上干涉成像系统，可降低系统设计难度、大幅提升成像质量。

自共相液体可变焦透镜阵列可广泛应用于光通信、光成像、光存储、光显示、光处理等领域。课题目标是研制一种自主创新的自共相光学变焦透镜阵列器件。研究内容包括：自共相光学变焦透镜阵列器件的参数设计、制作工艺、性能检测、机理分析及初步应用。项目的特色是制作自共相液体光学变焦透镜阵列器件，同时实现光学相位和焦距的共同调节。项目解决的关键技术是：自共相液体透镜阵列的结构优化设计制作技术以及精确调控技术，绝缘介质层的涂覆，液体的灌注与器件的封装；项目按照预定的计划圆满完成了任务书确定的研究目标：（一）研制成功了直径为12mm的自共相液体变焦透镜元件器件；（二）研制成功了1×3线阵和正三角形排布的电控自共相液体变焦透镜阵列器件；（三）基于润湿效应（EWOD）的液滴驱动机理研究取得进展；（四）基于介电润湿透镜和液体棱镜的的三维空间光束指向控制系统取得进展；（五）基于介电润湿液体棱镜/液体透镜的光束调整器取得进展；（六）基于三层液体透镜模型的人眼光学系统的研究取得进展。发表期刊论文26 篇，会议论文10篇，其中SCI 检索8篇，EI 检索17篇），申请发明专利 15 项（已获授权2项），培养研究生18名，超额完成了预期计划。