动静态结合的微悬臂梁阵列联合检测机理及传感器系统研究

Social security is an important factor that affects the daily human live and social stability. Chemical sensors with high sensitivity, ability of on-the-spot rapid detection and high reliability are the key approach to enable effectively monitoring and controlling social security. Single sensor suffers from cross sensitivity and bad selectivity, which could be solved by using sensor array. Micro-cantilever chemical sensor takes the advantages of high sensitivity, fast responsibility, small volume, easy to form an array and wide applicability, thus it is especially suitable for sensor array system, and has great potential in monitoring and controlling social security. In this project, we will try to solve the reliability problem by using combined dynamic and static micro-cantilever array and chemical sensor microsystems. Firstly we will thoroughly study on the sensing principle of the micro-cantilever sensor and the working mechanism of reliability enhancement with combined dynamic and static micro-cantilever array. Then we will fabricate the sensor chip with both dynamic and static micro-cantilever array integrated using IC compatible batch manufacturing process. Finally, integrating with virtual instrument technology and intelligent methods, we will construct the prototype of chemical gas sensor with high sensitivity, ability of on-the-spot rapid detection and high reliability. Through using the sensor prototype in monitoring social safety, this project will provide both theory and technology for the social security monitoring and detecting instruments.

公共安全事件是影响人民生活和社会安定的重要因素，高灵敏度、可现场快速检测、高可靠性的化学气体传感器是实现对公共安全有效监测和防控的重要途径。单一的气体传感器普遍存在交叉敏感、选择性差的问题，需要通过组成传感器阵列解决。微悬臂梁化学气体传感器具有灵敏度高、响应快、体积小、易于阵列化以及适用性广等优点，尤其适用于组成气体传感器阵列系统，在公共安全监测领域具有重要的应用潜力。项目将通过深入研究生化特异性反应能量通过界面效应转换为物理量的机制，以及动静态结合的微悬臂梁阵列联合检测提高可靠性的机制等关键科学问题，采用IC兼容的批量制造工艺开发微悬臂梁阵列化学气体传感器，并结合虚拟仪器技术及智能化算法，形成同时具备高灵敏度与高可靠性的现场快速检测化学传感器系统，并获得初步原理验证，为开拓我国公共安全监测与检测设备提供关键的基础理论与技术。

公共安全事件是影响人民生活和社会安定的重要因素，高灵敏度、可现场快速检测、高可靠性的化学气体传感器是实现对公共安全有效监测和防控的重要途径。单一的气体传感器普遍存在交叉敏感、选择性差的问题，需要通过组成传感器阵列解决。微悬臂梁化学气体传感器具有灵敏度高、响应快、体积小、易于阵列化以及适用性广等优点，尤其适用于组成气体传感器阵列系统，在公共安全监测领域具有重要的应用潜力。本项目通过深入研究生化特异性反应能量通过界面效应转换为物理量的机制，以及动静态结合的微悬臂梁阵列联合检测提高可靠性的机制等关键科学问题，采用IC兼容的批量制造工艺开发出微悬臂梁阵列化学气体传感器，并结合虚拟仪器技术及智能化算法，形成了同时具备高灵敏度与高可靠性的现场快速检测化学传感器系统，对DMMP、TNT、氨气和CO2这4种气体的检测下限分别达到7.2ppb、3.9ppt、5ppm和30ppm。该项目共发表了高水平SCI论文11篇，在MEMS领域顶级国际学术会议IEEE MEMS和Transducers上发表了会议报告11篇，共申请国家发明专利4项，培养博士研究生2名，硕士研究生4名。