微机电系统多尺度力学问题研究与实验验证

MEMS is one of the hot research topics in the world. However, the basic theoretical research is far behind the manufacturing and processing which is a bottleneck hinder for its development. Micro-scale property is the basic characteristics of the MEMS. In the micro-scale, the characteristics of the material exhibit complex multi-scale coupling problems with multi-scale length, multi-scale time and multi-levels. Using the typical MEMS components-micro-beam and micro-plate as the research objects, we will carry out scientific studies on the multi-scale mechanical modeling, multi-scale computational methods, dynamics control, and experimental research: (1) using the modified couple stress theory and Hamilton principle, we will construct the multi-scale mechanical model of flexible micro-component, and study the new dynamics due to the scale effect; (2) combining of micro- and macro- computational mechanical theory, we will develop the multi-scale computational methods of MEMS; (3) we will give a study on the pinning control of complex network system consisting of MEMS micro-components; (4) We will carry out the MEMS experimental research to verify the validity of the theory and numerical methods obtaining from this project. The project aims to develop the new theory and new methods of multi-scale modeling and dynamical control of complex systems, and open up a new research direction of the theory of dynamical systems. This project will benefit for the development of MEMS technology with independent intellectual property rights, and have a great significance to promote the practical application of MEMS technology in China.

微机电系统（MEMS）是当前的研究热点问题之一，但基础理论研究远落后于制造加工，是阻碍其发展的瓶颈。尺寸微小是MEMS的基本特征,材料本身的特性在微尺度下出现了跨长度、跨时间和跨层次的多尺度耦合问题。本项目针对典型的微机电系统构件- - 微梁和微板，开展富有力学特色的多尺度建模，多尺度计算、动力学控制及实验等科学问题的研究：（1）应用修正偶应力理论和Hamilton原理建立弹性微构件多尺度力学模型，研究尺度效应产生的动力学特性；（2）结合微观与宏观的计算理论，发展MEMS的多尺度计算方法；（3）研究由MEMS构件组成的复杂网络系统的宏观牵制控制；（4）搭建MEMS实验平台，实验验证理论与数值计算方法的有效性。项目致力于建立复杂系统多尺度建模与动力学控制的新理论与新方法，开辟动力系统理论的新研究方向。项目的完成对于发展具有自主知识产权的MEMS技术，推进MEMS技术在我国的实际应用具有现实意义。

微机电系统（MEMS）是当前的研究热点问题之一，但基础理论研究远落后于制造加工，是阻碍其发展的瓶颈。本项目针对典型的微机电系统构件——微梁，开展富有力学特色的多尺度建模，多尺度计算、动力学控制及实验等问题的研究：（1）应用微极弹性理论与修正偶应力理论建立弹性微构件多尺度力学模型，研究尺度效应及相应的动力学特性；（2）结合宏观模型与分子分子动力学方法，分析了微纳米尺度部件的尺度效应与多尺度计算方法；（3）研究微型构件组成的复杂网络系统的动力学与控制问题。项目建立了复杂系统多尺度建模与动力学控制的新理论与新方法，开辟动力系统理论的新研究方向。项目的完成对于发展具有自主知识产权技术，推进相关技术在我国的实际应用具有现实意义。