多孔质节流器渗透率空间分布性对气体静压轴承静态性能影响的研究

The air bearing is the key component of the ultraprecision machining equipment. The porous aerostatic bearings are widely applicated due to the high load capacity and stiffness. The application of porous material in the air bearing is limited by the randomicity of the permeability and distribution in porous material. The purpose of this project is to study the influence of the permeability distribution in porous restrictor on the static performance of air bearing. The detail research contents are included as follows: the model of the permeability distribution, evaluation index and evaluation system will be studied with the fractal theory; the influence of the factors on the model of permeability distribution in porous material will be studied, such as the different manufacture method and parameters, the stability of machining condition, the pore distribution and morphologies; the flow model for air lubrication will be established and solved with numerical method by taking the factor of permeability distribution into consideration; the flow model established for air lubrication will be validated by experimental method. The research results can supply the theoretical guidance for the design and manufacture of the precision air bearing in ultraprecision machining equipment and can be widely applicated in the important fields of national economy, such as precision instrument, microelectronics, aeronautics, astronautics and so on.

气体静压轴承是超精密加工装备的重要组成元件，多孔质气体轴承因其较高的承载能力和刚度得到了广泛应用。用于制造节流器的多孔材料渗透率及空间分布变化的随机性限制了其在气体轴承中的应用。本项目旨在研究多孔质节流器渗透率空间分布对气体轴承静态性能影响规律。具体内容包括：应用分形理论研究适用于多孔质节流器的渗透率空间分布模型、评价指标以及评价体系；研究多孔材料基材孔隙分布，微孔形貌等性质、不同的制造方法及参数、加工条件稳定性等因素对多孔质节流器渗透率空间分布模型的影响规律；建立将渗透率空间分布因素纳入的气体润滑流动模型并求解其数值解；以实验手段验证所建立的气体润滑流动模型。本项目的研究成果将为超精密加工装备中高精度气体轴承的设计制造提供理论指导，并可推广应用于精密仪器、微电子、航空航天等国民经济重要领域。

气体静压轴承是超精密加工装备的重要组成元件，多孔质气体轴承因其较高的承载能力和刚度得到了广泛应用。用于制造节流器的多孔材料渗透率及空间分布变化的随机性限制了其在气体轴承中的应用。本项目研究多孔质节流器渗透率空间分布对气体轴承静态性能影响规律。应用分形理论研究了适用于多孔质节流器的渗透率空间分布模型、评价指标以及评价体系；研究多孔材料基材孔隙分布，微孔形貌等性质、不同的制造方法及参数、加工条件稳定性等因素对多孔质节流器渗透率空间分布模型的影响规律，并通过实验验证了相关影响规律。本项目的研究成果将为超精密加工装备中高精度气体轴承的设计制造提供理论指导，并可推广应用于精密仪器、微电子、航空航天等国民经济重要领域。