高加速度下摆臂高频往复旋转高精定位控制研究

The position control of rotating arm is always the frontier hot research work in field of control, from control engineering point of view, rotating arm is a kind of load with nonlinear model. That, the high acceleration motion and the precise position of rotating arm, is not only one of the core technology of microelectronics and semiconductor manufacturing, but also the key functional requirements in the fields of high-technology such as aerospace institutions, precision equipment, robot, and so on. This program mainly studies on the control theory and method of rotating arm precision position with utmost acceleration in high-frequency reciprocating motion, which includes:(1)the mechanical dynamics characteristics of rotating arm with high acceleration,(2)the high frenquency response control of torque and speed based on reciprocating motion command in high acceleration,(3)the high-precision extended servo algorithm based on firm-soft coupling load, (4)the active vibration elimination control based on changeable damping by external incentives. Through this research, the dynamic characteristics of high-frequency reciprocating motion of rotating arm in utmost acceleration will be studied and the new strategy and new method for high response and precise position control will be explored, which will promote the development of the theory of motion control and enhance the core competitiveness of our country in high-end electronics manufacturing equipment field.

旋转摆臂的定位控制问题一直是控制领域中的前沿热门课题，从控制工程的角度来看，旋转摆臂是一种具有非线性模型的负载；旋转摆臂的高加速度运动和精确定位是微电子和半导体制造的核心技术之一,同时也是航天航空机构、精密设备和机器人等高尖端技术领域的关键功能要求。本课题主要研究高加速度下摆臂的高频往复旋转精确定位控制理论和方法，包括：①高加速度下旋转摆臂的机械动力学特性，②基于高加速度往复旋转运动命令的转矩和速度的高频响应控制，③基于刚柔耦合负载的高精度扩展伺服算法，④基于外部激励的变阻尼主动抑振控制。通过本课题的研究，探索高加速度下旋转摆臂高频往复运动的动力学行为规律及其高频响应、高精度定位控制新策略、新方法，推动运动控制理论的发展，提升我国高端电子制造装备的核心竞争力。

旋转摆臂的定位控制问题一直是控制领域中的前沿热门课题，从控制工程的角度来看，旋转摆臂是一种具有非线性模型的负载；旋转摆臂的高加速度运动和精确定位是微电子和半导体制造的核心技术之一,同时也是航天航空机构、精密设备和机器人等高尖端技术领域的关键功能要求。本课题主要研究高加速度下摆臂的高频往复旋转精确定位控制理论和方法，包括：①高加速度下旋转摆臂的机械动力学特性，②基于高加速度往复旋转运动命令的转矩和速度的高频响应控制，③基于刚柔耦合负载的高精度扩展伺服算法，④基于外部激励的变阻尼主动抑振控制。通过本课题研究，实现了摆臂高加速度下高频往复旋转高精度定位，对于180°的往复旋转运动，其旋转运动及到位整定时间在80ms之内，定位精度达到±4＂，实现了200mm摆臂末端定位精度±10µm精度要求。