基于电磁诱导透明效应的等离子体亚波长结构器件

Surface Plasmon Polaritons (SPPs) break the diffraction limit, possess surface area and near field enhanced two unique properties, and pave a way for the large-scale integrated-photonical and micro optical devices. Therefore, SPPs is becoming a research hotspot of modern photoelectric field. This project main researches the propagating of SPPs in the MIM and graphene shaped plasmonic structures of by finite-difference time-domain (FDTD) method and finite element method (FEM). The several novel two-dimensional and three-dimensional plasmonic devices of the multimode resonators structures based on the graphene, the graphene sheet structures based on the Si substrates, the hybird waveguide based on the groove structures and the MIM waveguide structures are fabricated. The electromagnetically induced transparency (EIT) effects and slow light effects are found in the parts of above devices. The EIT and slow light effects could be controled by tuned the structures and bias voltages Parameters. The operational principles of those effects are considered by theoretical methods such as coupled model theory (CMT), the transfer matrix theory. The experimental preparation methods including the electronic beam lithography, SiC epitaxial method and Chemical vapor deposition are adopted to manufacture those plasmonic subwavelegth devices. It will provide the basis for the designment of optoelectronic devices with market application prospects.

表面等离子体由于能突破衍射极限，其表面局域及近场增强的特性，为制造光子集成器件及微纳光学器件提供有效途径，成为目前光电研究领域的热门研究课题。本项目利用有限元法及时域有限差分法，研究等离子体激元在MIM及石墨烯等离子体结构中的传播，构造基于石墨烯多模谐振腔结构、硅基石墨烯平层结构、凹槽混合波导结构及MIM波导结构等多种新颖二维及三维等离子体亚波长器件。通过调节结构及外加电压参数，控制其中电磁诱导透明效应的产生。利用耦合模式、传输矩阵等理论分析电磁诱导透明及慢光效应的工作机制。利用电子束刻蚀、SiC外延及化学气相沉积等实验制备方法，对理论提出的等离子体亚波长器件进行实验制备，为设计具有市场应用前景的微纳集成器件提供依据。

表面等离子体由于能突破衍射极限，其表面局域及近场增强的特性，为制造光子集成器件及微纳光学器件提供有效途径，成为目前光电研究领域的热门研究课题。本项目利用有限元法及时域有限差分法，研究了等离子体激元在金属-介质-金属波导及石墨烯等离子体微纳结构中的传播特性，构造基于石墨烯多模谐振腔结构、硅基石墨烯多层超材料微结构、金属-介质-金属波导结构、石墨烯/金属/介质阵列超表面微结构等多种新颖二维及三维等离子体亚波长光电器件。通过调节设计器件的结构参数、材料介电册数、二维材料外加电压等参数，控制设计结构中的电磁诱导透明效应、电磁诱导吸收效应、法诺共振效应的产生及调控，动态调控电磁诱导透明的多模态效应及超精细法诺共振峰，用于设计高灵敏度的微结构光学传感器。此外，利用经典波导理论，耦合模式、传输线、传输矩阵等理论分析法诺共振效应、电磁诱导透明效应、电磁诱导吸收效应及慢光效应的工作机制，得到很好的理论指导作用。利用PVD镀膜、激光刻蚀、电子束刻蚀、CVD等实验制备方法，对理论设计的部分超材料/超表面等离子体器件进行实验制备，为设计具有市场应用前景的微纳集成器件提供重要的依据。