基于多种新颖MIM波导结构表面等离子体器件的理论设计

With the development of the microelectronics and semiconductor industry, The desire of people to explore the microscopic world and transformation are keep strengthening. Surface Plasmon Polaritons(SPPs) break the diffraction limit, possess surface area and near field enhanced two unique properties, and pave a way for the large-scale photonic integration. Therefore, SPPs is becoming a research hotspot of modern photoelectric field. In recent years, directional excitating and controling the propagation of SPPs waves by using metal-insulator-metal(MIM) micro nano structures are one of the hot issues of micro nano optics field. This project analyses theoretically the physical mechanisms of surface plasmon polaritons in the MIM subwavelength structures. The optical transmission characteristics of the Dichroic splitter with two subwavelength metallic slits, one-way excitational actuator with nano-slit and nano-groove, double-groove shaped MIM waveguide optical filters, T-shape waveguide optical splitter with stub Structure are depicted by finite-difference time-domain method and finite element method. In addition, the he design schemes of various devices are put forward and verified, and it also provides the theoretical basis for the designment of optoelectronic devices with market application prospects.

随着微电子及半导体产业的不断发展，人们对微观世界探索与改造的欲望不断加强。表面等离子体(Surfaec Plasmon Polaritons, SPPs)能够突破衍射极限，具有表面局域和近场增强两个独特性质,为大规模光子集成及微结构器件设计提供了途径，成为现代光电领域的研究热点。近年来，利用金属-介质-金属（MIM）微纳结构定向激发和操控SPPs波传播是微纳光学研究热门问题之一。本项目从理论上分析表面等离子体激元在MIM亚波长结构中的物理机制，利用时域有限差分法及有限元法进行数值计算，描绘基于SPPs理论设计的MIM双缝结构可见光分束器、金属狭缝及凹槽MIM结构可见光定向激发器、双槽MIM波导滤波器及T型stub结构MIM波导滤波器等元器件的光强传输特性，理论上提出上述器件的设计方案并加以验证，为设计具有市场应用前景的光电器件提供理论依据。

利用MIM微纳结构定向激发和操控SPPs波传播成为微纳光学研究热门问题。SPPs原理应用在MIM结构可以设计各种高性能、微结构的光通信元器件,具有极好的应用前景。近几年基于MIM亚波长波导结构SPPs器件的电磁诱导透明（Electromagnetically Induced Transparency, EIT）、Fano效应及其产生的慢光效应研究也成为微纳光学及亚波长光学领域的热点。本项目首先研究了MIM波导结构的表面等离子体波传输特性，构建基于MIM亚波长的非对称多凹槽波导、双斜狭缝波导、双狭缝波导等结构，研究上述结构的滤波特性、定向激发及光分束特性，发现部分结构中具有电磁诱导透明效应、Fano效应及慢光效应。其次，研究了基于T型波导若干结构（带可移动支节、1/4圆环共振微腔）及双波导及圆环共振微腔结构等表面等离子体波传输特性，研究共振微腔、可移动支节等结构对等离子波传输的影响，藉此设置分束器、滤波器、耦合器，并研究其中的Fano及电磁诱导透明效应。再次，设计了基于多层金属-介质结构的可调表面等离子体光刻技术及填充液晶的金属狭缝阵列结构对光束的调控技术，设计了基于整数规划等离子体波导模型的解分复用器及基于矩形环共振腔与入射波导接桥的表面等离子体滤波器。