微加速度计失效行为的研究

Microaccelerometers are applied widely in fuses of missiles and shells. Its mechanical properties, microbridge deflection and calibration are studied. The mechanical properties of chips used in the microaccelerometers and microbridge deflection were measured by MTS Nano Indenter XP system.Calibration ways are also developed to fit microaccelerometers. The work is the result of a need to develop optimized design and fabrication of microaccelerometers and to provide experimental data for forming related microscale mechanics modes.

选择在军事上有广泛应用前景的微加速度计为研究对象，从实验研究、理论分析和数值模拟三方面研究其在静载、振动和冲击作用下的失效行为，分析尺寸效应和表面效应对微结构的影响。为微加速度计的结构优化设计和改善工艺提供依据，同时为微尺度力学相关模型的建立提供实验基础