基于激光准直光线漂移补偿的高精度滚转角测量方法研究

The simultaneous measurements of multi-degree-of-freedom errors play an important role in many fields such as precision mechanical manufacturing and instruments, because of the advantages of high precision, high efficient and online dynamic measurement. However, for roll measurement, some problems still need to be solved, such as improvement of measurement accuracy and system integration of multi-parameters measurement. The purpose of the research is to study high precision roll measurement methods based on laser collimation, which applied in the simultaneous measurements of multi-degree-of-freedom errors, mainly study and solve the problems caused by laser beam drift (especially laser beam drift induced by air turbulence) and the parallelism error of the measurement beams. This study has two objectives: 1) to develop a theoretical algorithm for estimating the location of the angular drift and to establish an optimal model for compensating laser beam drift, by utilizing the abruption characteristic of laser beam drift; 2) to analyze and establish a model of the errors crosstalk to eliminate the crosstalk, on the basis of which, establish an optimal model for compensating parallelism error, by means of calibration test and appropriate algorithm. This research provides a solid theoretical and technical basis for such type of laser measurement applications. At the same time，the studies of the key issues provide ideas for solving some common problems in the field of laser measurement. It has important application value and scientific significance.

高精度多自由度误差同时测量是实现精密加工与制造等行业高精度、高效率及动态在线检测需求的重要手段。其中滚转角误差测量目前仍存在测量精度不高、难于与其他自由度误差测量集成等问题。本项目基于激光准直技术，研究适于多自由度误差同时测量集成的高精度滚转角测量方法，重点研究解决激光光线漂移（尤其是空气扰动产生的角度漂移）以及测量光束平行性误差对测量精度影响问题。主要研究内容包括：1)利用光线漂移量相对于待检测量一般为突变量的特性，采用适当算法估算角度漂移发生的位置，建立光线漂移实时补偿模型；2)分析建立误差串扰模型进而消除误差串扰，在此基础上，基于适当算法及实验标定等手段，建立平行性误差补偿模型。本项目研究将为此类激光测量应用奠定坚实的理论与技术基础，同时，关键问题的研究将为解决激光测量领域的一些共性问题提供思路，具有重要的应用价值和科学意义。

高精度多自由度误差同时测量是实现精密加工与制造等行业高精度、高效率及动态在线检测需求的重要手段。其中滚转角误差测量目前仍存在测量精度不高、难于与其他自由度误差测量集成等问题。本项目基于激光准直技术，研究适于多自由度误差同时测量集成的高精度滚转角测量方法，重点研究解决激光光线漂移（尤其是空气扰动产生的角度漂移）以及测量光束平行性误差对测量精度影响问题。主要研究内容及成果包括：1)对滚转角测量方法中的误差串扰及平行性误差补偿进行了研究，滚转角测量分辨率达到0.1″，相关研究工作成果发表论文2篇；2)对激光光线漂移特性、光漂补偿方法进行了研究，经光漂补偿后，滚转角测量精度达到1″，相关研究工作成果发表论文4篇，申请专利1项；3)对多自由度误差同时测量进行了研究，实现了包含滚转角的多自由度同时测量，相关研究工作成果发表论文2篇。通过本项目研究，提出并验证了两种可以实现光漂补偿的高精度滚转角测量方法和多自由度误差同时测量方案，提出了全光路光漂补偿的概念和思路，可以为基于激光准直技术的多自由度误差测量研究提供理论方案及技术参考，也可以为解决激光测量领域的一些共性问题提供思路。